5/27/2010	8:29:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/27/2010	8:29:50 AM	Recipe started at 8:29 AM
5/27/2010	8:29:50 AM	H2 valve closed
5/27/2010	8:29:50 AM	BCl3 valve closed
5/27/2010	8:29:50 AM	PH3 valve closed
5/27/2010	8:29:50 AM	SiCl4 pre valve closed
5/27/2010	8:29:50 AM	SiCl4 post valve closed
5/27/2010	8:29:50 AM	Main Vac valve closed
5/27/2010	8:29:50 AM	Bypass valve closed
5/27/2010	8:29:50 AM	Bubbler valve closed
5/27/2010	8:29:50 AM	Helium valve opened
5/27/2010	8:29:50 AM	Helium MFC set to  500.000000
5/27/2010	8:29:50 AM	H2 MFC set to  0.000000
5/27/2010	8:29:50 AM	BCl3 MFC set to  0.000000
5/27/2010	8:29:50 AM	PHl3 MFC set to  0.000000
5/27/2010	8:29:50 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:29:50 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:29:50 AM	Tube furnace set to 0
5/27/2010	8:31:11 AM	Helium valve closed
5/27/2010	8:31:11 AM	H2 valve closed
5/27/2010	8:31:11 AM	BCl3 valve closed
5/27/2010	8:31:11 AM	PH3 valve closed
5/27/2010	8:31:11 AM	SiCl4 pre valve closed
5/27/2010	8:31:11 AM	SiCl4 post valve closed
5/27/2010	8:31:11 AM	Main Vac valve closed
5/27/2010	8:31:11 AM	Bypass valve closed
5/27/2010	8:31:11 AM	Bubbler valve closed
5/27/2010	8:31:11 AM	Helium MFC set to  0.000000
5/27/2010	8:31:11 AM	H2 MFC set to  0.000000
5/27/2010	8:31:11 AM	BCl3 MFC set to  0.000000
5/27/2010	8:31:11 AM	PHl3 MFC set to  0.000000
5/27/2010	8:31:11 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:31:11 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:31:11 AM	Tube furnace set to 0
5/27/2010	8:31:11 AM	Run finished at 8:31 AM
5/27/2010	8:31:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/27/2010	8:39:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	8:39:46 AM	Recipe started at 8:39 AM
5/27/2010	8:39:46 AM	Helium valve closed
5/27/2010	8:39:46 AM	H2 valve closed
5/27/2010	8:39:46 AM	BCl3 valve closed
5/27/2010	8:39:46 AM	PH3 valve closed
5/27/2010	8:39:46 AM	SiCl4 pre valve closed
5/27/2010	8:39:46 AM	SiCl4 post valve closed
5/27/2010	8:39:46 AM	Main Vac valve closed
5/27/2010	8:39:46 AM	Bubbler valve closed
5/27/2010	8:39:46 AM	Bypass valve opened
5/27/2010	8:39:46 AM	Helium MFC set to  0.000000
5/27/2010	8:39:46 AM	H2 MFC set to  0.000000
5/27/2010	8:39:46 AM	BCl3 MFC set to  0.000000
5/27/2010	8:39:46 AM	PHl3 MFC set to  0.000000
5/27/2010	8:39:46 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:39:46 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:39:46 AM	Tube furnace set to 0
5/27/2010	8:40:33 AM	Helium valve closed
5/27/2010	8:40:33 AM	H2 valve closed
5/27/2010	8:40:33 AM	BCl3 valve closed
5/27/2010	8:40:33 AM	PH3 valve closed
5/27/2010	8:40:33 AM	SiCl4 pre valve closed
5/27/2010	8:40:33 AM	SiCl4 post valve closed
5/27/2010	8:40:33 AM	Bubbler valve closed
5/27/2010	8:40:33 AM	Main Vac valve opened
5/27/2010	8:40:33 AM	Bypass valve opened
5/27/2010	8:40:33 AM	Helium MFC set to  0.000000
5/27/2010	8:40:33 AM	H2 MFC set to  0.000000
5/27/2010	8:40:33 AM	BCl3 MFC set to  0.000000
5/27/2010	8:40:33 AM	PHl3 MFC set to  0.000000
5/27/2010	8:40:33 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:40:33 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:40:33 AM	Tube furnace set to 0
5/27/2010	8:40:33 AM	Run finished at 8:40 AM
5/27/2010	8:40:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	8:44:28 AM	Bypass valve closed
5/27/2010	8:44:28 AM	Main Vac valve closed
5/27/2010	8:44:35 AM	Main Vac valve opened
5/27/2010	8:44:36 AM	Bypass valve opened
5/27/2010	8:44:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/27/2010	8:44:51 AM	Recipe started at 8:44 AM
5/27/2010	8:44:51 AM	H2 valve closed
5/27/2010	8:44:51 AM	BCl3 valve closed
5/27/2010	8:44:51 AM	PH3 valve closed
5/27/2010	8:44:51 AM	SiCl4 pre valve closed
5/27/2010	8:44:51 AM	SiCl4 post valve closed
5/27/2010	8:44:51 AM	Main Vac valve closed
5/27/2010	8:44:51 AM	Bypass valve closed
5/27/2010	8:44:51 AM	Bubbler valve closed
5/27/2010	8:44:51 AM	Helium valve opened
5/27/2010	8:44:51 AM	Helium MFC set to  500.000000
5/27/2010	8:44:51 AM	H2 MFC set to  0.000000
5/27/2010	8:44:51 AM	BCl3 MFC set to  0.000000
5/27/2010	8:44:51 AM	PHl3 MFC set to  0.000000
5/27/2010	8:44:51 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:44:51 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:44:51 AM	Tube furnace set to 0
5/27/2010	8:46:14 AM	Helium valve closed
5/27/2010	8:46:14 AM	H2 valve closed
5/27/2010	8:46:14 AM	BCl3 valve closed
5/27/2010	8:46:14 AM	PH3 valve closed
5/27/2010	8:46:14 AM	SiCl4 pre valve closed
5/27/2010	8:46:14 AM	SiCl4 post valve closed
5/27/2010	8:46:14 AM	Main Vac valve closed
5/27/2010	8:46:14 AM	Bypass valve closed
5/27/2010	8:46:14 AM	Bubbler valve closed
5/27/2010	8:46:14 AM	Helium MFC set to  0.000000
5/27/2010	8:46:14 AM	H2 MFC set to  0.000000
5/27/2010	8:46:14 AM	BCl3 MFC set to  0.000000
5/27/2010	8:46:14 AM	PHl3 MFC set to  0.000000
5/27/2010	8:46:14 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:46:14 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:46:14 AM	Tube furnace set to 0
5/27/2010	8:46:29 AM	Helium valve closed
5/27/2010	8:46:29 AM	H2 valve closed
5/27/2010	8:46:29 AM	BCl3 valve closed
5/27/2010	8:46:29 AM	PH3 valve closed
5/27/2010	8:46:29 AM	SiCl4 pre valve closed
5/27/2010	8:46:29 AM	SiCl4 post valve closed
5/27/2010	8:46:29 AM	Main Vac valve closed
5/27/2010	8:46:29 AM	Bubbler valve closed
5/27/2010	8:46:29 AM	Bypass valve opened
5/27/2010	8:46:29 AM	Helium MFC set to  0.000000
5/27/2010	8:46:29 AM	H2 MFC set to  0.000000
5/27/2010	8:46:29 AM	BCl3 MFC set to  0.000000
5/27/2010	8:46:29 AM	PHl3 MFC set to  0.000000
5/27/2010	8:46:29 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:46:29 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:46:29 AM	Tube furnace set to 0
5/27/2010	8:47:02 AM	Helium valve closed
5/27/2010	8:47:02 AM	H2 valve closed
5/27/2010	8:47:02 AM	BCl3 valve closed
5/27/2010	8:47:02 AM	PH3 valve closed
5/27/2010	8:47:02 AM	SiCl4 pre valve closed
5/27/2010	8:47:02 AM	SiCl4 post valve closed
5/27/2010	8:47:02 AM	Bubbler valve closed
5/27/2010	8:47:02 AM	Main Vac valve opened
5/27/2010	8:47:02 AM	Bypass valve opened
5/27/2010	8:47:02 AM	Helium MFC set to  0.000000
5/27/2010	8:47:02 AM	H2 MFC set to  0.000000
5/27/2010	8:47:02 AM	BCl3 MFC set to  0.000000
5/27/2010	8:47:02 AM	PHl3 MFC set to  0.000000
5/27/2010	8:47:02 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:47:02 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:47:02 AM	Tube furnace set to 0
5/27/2010	8:52:02 AM	H2 valve closed
5/27/2010	8:52:02 AM	BCl3 valve closed
5/27/2010	8:52:02 AM	PH3 valve closed
5/27/2010	8:52:02 AM	SiCl4 pre valve closed
5/27/2010	8:52:02 AM	SiCl4 post valve closed
5/27/2010	8:52:02 AM	Main Vac valve closed
5/27/2010	8:52:02 AM	Bypass valve closed
5/27/2010	8:52:02 AM	Bubbler valve closed
5/27/2010	8:52:02 AM	Helium valve opened
5/27/2010	8:52:02 AM	Helium MFC set to  500.000000
5/27/2010	8:52:02 AM	H2 MFC set to  0.000000
5/27/2010	8:52:02 AM	BCl3 MFC set to  0.000000
5/27/2010	8:52:02 AM	PHl3 MFC set to  0.000000
5/27/2010	8:52:02 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:52:02 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:52:02 AM	Tube furnace set to 0
5/27/2010	8:53:25 AM	Helium valve closed
5/27/2010	8:53:25 AM	H2 valve closed
5/27/2010	8:53:25 AM	BCl3 valve closed
5/27/2010	8:53:25 AM	PH3 valve closed
5/27/2010	8:53:25 AM	SiCl4 pre valve closed
5/27/2010	8:53:25 AM	SiCl4 post valve closed
5/27/2010	8:53:25 AM	Main Vac valve closed
5/27/2010	8:53:25 AM	Bypass valve closed
5/27/2010	8:53:25 AM	Bubbler valve closed
5/27/2010	8:53:25 AM	Helium MFC set to  0.000000
5/27/2010	8:53:25 AM	H2 MFC set to  0.000000
5/27/2010	8:53:25 AM	BCl3 MFC set to  0.000000
5/27/2010	8:53:25 AM	PHl3 MFC set to  0.000000
5/27/2010	8:53:25 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:53:25 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:53:25 AM	Tube furnace set to 0
5/27/2010	8:53:40 AM	Helium valve closed
5/27/2010	8:53:40 AM	H2 valve closed
5/27/2010	8:53:40 AM	BCl3 valve closed
5/27/2010	8:53:40 AM	PH3 valve closed
5/27/2010	8:53:40 AM	SiCl4 pre valve closed
5/27/2010	8:53:40 AM	SiCl4 post valve closed
5/27/2010	8:53:40 AM	Main Vac valve closed
5/27/2010	8:53:40 AM	Bubbler valve closed
5/27/2010	8:53:40 AM	Bypass valve opened
5/27/2010	8:53:40 AM	Helium MFC set to  0.000000
5/27/2010	8:53:40 AM	H2 MFC set to  0.000000
5/27/2010	8:53:40 AM	BCl3 MFC set to  0.000000
5/27/2010	8:53:40 AM	PHl3 MFC set to  0.000000
5/27/2010	8:53:40 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:53:40 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:53:40 AM	Tube furnace set to 0
5/27/2010	8:54:13 AM	Helium valve closed
5/27/2010	8:54:13 AM	H2 valve closed
5/27/2010	8:54:13 AM	BCl3 valve closed
5/27/2010	8:54:13 AM	PH3 valve closed
5/27/2010	8:54:13 AM	SiCl4 pre valve closed
5/27/2010	8:54:13 AM	SiCl4 post valve closed
5/27/2010	8:54:13 AM	Bubbler valve closed
5/27/2010	8:54:13 AM	Main Vac valve opened
5/27/2010	8:54:13 AM	Bypass valve opened
5/27/2010	8:54:13 AM	Helium MFC set to  0.000000
5/27/2010	8:54:13 AM	H2 MFC set to  0.000000
5/27/2010	8:54:13 AM	BCl3 MFC set to  0.000000
5/27/2010	8:54:13 AM	PHl3 MFC set to  0.000000
5/27/2010	8:54:13 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:54:13 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:54:13 AM	Tube furnace set to 0
5/27/2010	8:59:13 AM	H2 valve closed
5/27/2010	8:59:13 AM	BCl3 valve closed
5/27/2010	8:59:13 AM	PH3 valve closed
5/27/2010	8:59:13 AM	SiCl4 pre valve closed
5/27/2010	8:59:13 AM	SiCl4 post valve closed
5/27/2010	8:59:13 AM	Main Vac valve closed
5/27/2010	8:59:13 AM	Bypass valve closed
5/27/2010	8:59:13 AM	Bubbler valve closed
5/27/2010	8:59:13 AM	Helium valve opened
5/27/2010	8:59:13 AM	Helium MFC set to  500.000000
5/27/2010	8:59:13 AM	H2 MFC set to  0.000000
5/27/2010	8:59:13 AM	BCl3 MFC set to  0.000000
5/27/2010	8:59:13 AM	PHl3 MFC set to  0.000000
5/27/2010	8:59:13 AM	SiCl4 MFC set to  0.000000
5/27/2010	8:59:13 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:59:14 AM	Tube furnace set to 0
5/27/2010	9:00:36 AM	Helium valve closed
5/27/2010	9:00:36 AM	H2 valve closed
5/27/2010	9:00:36 AM	BCl3 valve closed
5/27/2010	9:00:36 AM	PH3 valve closed
5/27/2010	9:00:36 AM	SiCl4 pre valve closed
5/27/2010	9:00:36 AM	SiCl4 post valve closed
5/27/2010	9:00:36 AM	Main Vac valve closed
5/27/2010	9:00:36 AM	Bypass valve closed
5/27/2010	9:00:36 AM	Bubbler valve closed
5/27/2010	9:00:36 AM	Helium MFC set to  0.000000
5/27/2010	9:00:36 AM	H2 MFC set to  0.000000
5/27/2010	9:00:36 AM	BCl3 MFC set to  0.000000
5/27/2010	9:00:36 AM	PHl3 MFC set to  0.000000
5/27/2010	9:00:36 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:00:36 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:00:36 AM	Tube furnace set to 0
5/27/2010	9:00:51 AM	Helium valve closed
5/27/2010	9:00:51 AM	H2 valve closed
5/27/2010	9:00:51 AM	BCl3 valve closed
5/27/2010	9:00:51 AM	PH3 valve closed
5/27/2010	9:00:51 AM	SiCl4 pre valve closed
5/27/2010	9:00:51 AM	SiCl4 post valve closed
5/27/2010	9:00:51 AM	Main Vac valve closed
5/27/2010	9:00:51 AM	Bubbler valve closed
5/27/2010	9:00:51 AM	Bypass valve opened
5/27/2010	9:00:51 AM	Helium MFC set to  0.000000
5/27/2010	9:00:51 AM	H2 MFC set to  0.000000
5/27/2010	9:00:51 AM	BCl3 MFC set to  0.000000
5/27/2010	9:00:51 AM	PHl3 MFC set to  0.000000
5/27/2010	9:00:51 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:00:51 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:00:51 AM	Tube furnace set to 0
5/27/2010	9:01:24 AM	Helium valve closed
5/27/2010	9:01:24 AM	H2 valve closed
5/27/2010	9:01:24 AM	BCl3 valve closed
5/27/2010	9:01:24 AM	PH3 valve closed
5/27/2010	9:01:24 AM	SiCl4 pre valve closed
5/27/2010	9:01:24 AM	SiCl4 post valve closed
5/27/2010	9:01:24 AM	Bubbler valve closed
5/27/2010	9:01:24 AM	Main Vac valve opened
5/27/2010	9:01:24 AM	Bypass valve opened
5/27/2010	9:01:24 AM	Helium MFC set to  0.000000
5/27/2010	9:01:24 AM	H2 MFC set to  0.000000
5/27/2010	9:01:24 AM	BCl3 MFC set to  0.000000
5/27/2010	9:01:24 AM	PHl3 MFC set to  0.000000
5/27/2010	9:01:25 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:01:25 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:01:25 AM	Tube furnace set to 0
5/27/2010	9:06:25 AM	Helium valve closed
5/27/2010	9:06:25 AM	H2 valve closed
5/27/2010	9:06:25 AM	BCl3 valve closed
5/27/2010	9:06:25 AM	PH3 valve closed
5/27/2010	9:06:25 AM	SiCl4 pre valve closed
5/27/2010	9:06:25 AM	SiCl4 post valve closed
5/27/2010	9:06:25 AM	Bubbler valve closed
5/27/2010	9:06:25 AM	Main Vac valve opened
5/27/2010	9:06:25 AM	Bypass valve opened
5/27/2010	9:06:25 AM	Helium MFC set to  0.000000
5/27/2010	9:06:25 AM	H2 MFC set to  0.000000
5/27/2010	9:06:25 AM	BCl3 MFC set to  0.000000
5/27/2010	9:06:25 AM	PHl3 MFC set to  0.000000
5/27/2010	9:06:25 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:06:25 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:06:25 AM	Tube furnace set to 0
5/27/2010	9:06:26 AM	Run finished at 9:06 AM
5/27/2010	9:06:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/27/2010	9:47:23 AM	Bypass valve closed
5/27/2010	9:47:24 AM	Main Vac valve closed
5/27/2010	9:47:33 AM	Bypass valve opened
5/27/2010	9:47:34 AM	Main Vac valve opened
5/27/2010	9:47:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/27/2010	9:47:41 AM	Recipe started at 9:47 AM
5/27/2010	9:47:41 AM	H2 valve closed
5/27/2010	9:47:41 AM	BCl3 valve closed
5/27/2010	9:47:41 AM	PH3 valve closed
5/27/2010	9:47:41 AM	SiCl4 pre valve closed
5/27/2010	9:47:41 AM	SiCl4 post valve closed
5/27/2010	9:47:41 AM	Main Vac valve closed
5/27/2010	9:47:41 AM	Bypass valve closed
5/27/2010	9:47:41 AM	Bubbler valve closed
5/27/2010	9:47:41 AM	Helium valve opened
5/27/2010	9:47:41 AM	Helium MFC set to  500.000000
5/27/2010	9:47:41 AM	H2 MFC set to  0.000000
5/27/2010	9:47:41 AM	BCl3 MFC set to  0.000000
5/27/2010	9:47:41 AM	PHl3 MFC set to  0.000000
5/27/2010	9:47:41 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:47:41 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:47:41 AM	Tube furnace set to 0
5/27/2010	9:49:04 AM	Helium valve closed
5/27/2010	9:49:04 AM	H2 valve closed
5/27/2010	9:49:04 AM	BCl3 valve closed
5/27/2010	9:49:04 AM	PH3 valve closed
5/27/2010	9:49:04 AM	SiCl4 pre valve closed
5/27/2010	9:49:04 AM	SiCl4 post valve closed
5/27/2010	9:49:04 AM	Main Vac valve closed
5/27/2010	9:49:04 AM	Bypass valve closed
5/27/2010	9:49:04 AM	Bubbler valve closed
5/27/2010	9:49:04 AM	Helium MFC set to  0.000000
5/27/2010	9:49:04 AM	H2 MFC set to  0.000000
5/27/2010	9:49:04 AM	BCl3 MFC set to  0.000000
5/27/2010	9:49:04 AM	PHl3 MFC set to  0.000000
5/27/2010	9:49:04 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:49:04 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:49:04 AM	Tube furnace set to 0
5/27/2010	9:49:19 AM	Helium valve closed
5/27/2010	9:49:19 AM	H2 valve closed
5/27/2010	9:49:19 AM	BCl3 valve closed
5/27/2010	9:49:19 AM	PH3 valve closed
5/27/2010	9:49:19 AM	SiCl4 pre valve closed
5/27/2010	9:49:19 AM	SiCl4 post valve closed
5/27/2010	9:49:19 AM	Main Vac valve closed
5/27/2010	9:49:19 AM	Bubbler valve closed
5/27/2010	9:49:19 AM	Bypass valve opened
5/27/2010	9:49:19 AM	Helium MFC set to  0.000000
5/27/2010	9:49:19 AM	H2 MFC set to  0.000000
5/27/2010	9:49:19 AM	BCl3 MFC set to  0.000000
5/27/2010	9:49:19 AM	PHl3 MFC set to  0.000000
5/27/2010	9:49:19 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:49:19 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:49:19 AM	Tube furnace set to 0
5/27/2010	9:49:52 AM	Helium valve closed
5/27/2010	9:49:52 AM	H2 valve closed
5/27/2010	9:49:52 AM	BCl3 valve closed
5/27/2010	9:49:52 AM	PH3 valve closed
5/27/2010	9:49:52 AM	SiCl4 pre valve closed
5/27/2010	9:49:52 AM	SiCl4 post valve closed
5/27/2010	9:49:52 AM	Bubbler valve closed
5/27/2010	9:49:52 AM	Main Vac valve opened
5/27/2010	9:49:52 AM	Bypass valve opened
5/27/2010	9:49:52 AM	Helium MFC set to  0.000000
5/27/2010	9:49:52 AM	H2 MFC set to  0.000000
5/27/2010	9:49:52 AM	BCl3 MFC set to  0.000000
5/27/2010	9:49:52 AM	PHl3 MFC set to  0.000000
5/27/2010	9:49:52 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:49:52 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:49:53 AM	Tube furnace set to 0
5/27/2010	9:54:53 AM	H2 valve closed
5/27/2010	9:54:53 AM	BCl3 valve closed
5/27/2010	9:54:53 AM	PH3 valve closed
5/27/2010	9:54:53 AM	SiCl4 pre valve closed
5/27/2010	9:54:53 AM	SiCl4 post valve closed
5/27/2010	9:54:53 AM	Main Vac valve closed
5/27/2010	9:54:53 AM	Bypass valve closed
5/27/2010	9:54:53 AM	Bubbler valve closed
5/27/2010	9:54:53 AM	Helium valve opened
5/27/2010	9:54:53 AM	Helium MFC set to  500.000000
5/27/2010	9:54:53 AM	H2 MFC set to  0.000000
5/27/2010	9:54:53 AM	BCl3 MFC set to  0.000000
5/27/2010	9:54:53 AM	PHl3 MFC set to  0.000000
5/27/2010	9:54:53 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:54:53 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:54:53 AM	Tube furnace set to 0
5/27/2010	9:56:15 AM	Helium valve closed
5/27/2010	9:56:15 AM	H2 valve closed
5/27/2010	9:56:15 AM	BCl3 valve closed
5/27/2010	9:56:15 AM	PH3 valve closed
5/27/2010	9:56:15 AM	SiCl4 pre valve closed
5/27/2010	9:56:15 AM	SiCl4 post valve closed
5/27/2010	9:56:15 AM	Main Vac valve closed
5/27/2010	9:56:15 AM	Bypass valve closed
5/27/2010	9:56:15 AM	Bubbler valve closed
5/27/2010	9:56:15 AM	Helium MFC set to  0.000000
5/27/2010	9:56:15 AM	H2 MFC set to  0.000000
5/27/2010	9:56:15 AM	BCl3 MFC set to  0.000000
5/27/2010	9:56:15 AM	PHl3 MFC set to  0.000000
5/27/2010	9:56:15 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:56:15 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:56:15 AM	Tube furnace set to 0
5/27/2010	9:56:30 AM	Helium valve closed
5/27/2010	9:56:30 AM	H2 valve closed
5/27/2010	9:56:30 AM	BCl3 valve closed
5/27/2010	9:56:30 AM	PH3 valve closed
5/27/2010	9:56:30 AM	SiCl4 pre valve closed
5/27/2010	9:56:30 AM	SiCl4 post valve closed
5/27/2010	9:56:30 AM	Main Vac valve closed
5/27/2010	9:56:30 AM	Bubbler valve closed
5/27/2010	9:56:30 AM	Bypass valve opened
5/27/2010	9:56:30 AM	Helium MFC set to  0.000000
5/27/2010	9:56:30 AM	H2 MFC set to  0.000000
5/27/2010	9:56:30 AM	BCl3 MFC set to  0.000000
5/27/2010	9:56:30 AM	PHl3 MFC set to  0.000000
5/27/2010	9:56:30 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:56:30 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:56:31 AM	Tube furnace set to 0
5/27/2010	9:57:04 AM	Helium valve closed
5/27/2010	9:57:04 AM	H2 valve closed
5/27/2010	9:57:04 AM	BCl3 valve closed
5/27/2010	9:57:04 AM	PH3 valve closed
5/27/2010	9:57:04 AM	SiCl4 pre valve closed
5/27/2010	9:57:04 AM	SiCl4 post valve closed
5/27/2010	9:57:04 AM	Bubbler valve closed
5/27/2010	9:57:04 AM	Main Vac valve opened
5/27/2010	9:57:04 AM	Bypass valve opened
5/27/2010	9:57:04 AM	Helium MFC set to  0.000000
5/27/2010	9:57:04 AM	H2 MFC set to  0.000000
5/27/2010	9:57:04 AM	BCl3 MFC set to  0.000000
5/27/2010	9:57:04 AM	PHl3 MFC set to  0.000000
5/27/2010	9:57:04 AM	SiCl4 MFC set to  0.000000
5/27/2010	9:57:04 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:57:04 AM	Tube furnace set to 0
5/27/2010	10:02:04 AM	H2 valve closed
5/27/2010	10:02:04 AM	BCl3 valve closed
5/27/2010	10:02:04 AM	PH3 valve closed
5/27/2010	10:02:04 AM	SiCl4 pre valve closed
5/27/2010	10:02:04 AM	SiCl4 post valve closed
5/27/2010	10:02:04 AM	Main Vac valve closed
5/27/2010	10:02:04 AM	Bypass valve closed
5/27/2010	10:02:04 AM	Bubbler valve closed
5/27/2010	10:02:04 AM	Helium valve opened
5/27/2010	10:02:04 AM	Helium MFC set to  500.000000
5/27/2010	10:02:04 AM	H2 MFC set to  0.000000
5/27/2010	10:02:04 AM	BCl3 MFC set to  0.000000
5/27/2010	10:02:04 AM	PHl3 MFC set to  0.000000
5/27/2010	10:02:04 AM	SiCl4 MFC set to  0.000000
5/27/2010	10:02:04 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	10:02:04 AM	Tube furnace set to 0
5/27/2010	10:03:26 AM	Helium valve closed
5/27/2010	10:03:26 AM	H2 valve closed
5/27/2010	10:03:26 AM	BCl3 valve closed
5/27/2010	10:03:26 AM	PH3 valve closed
5/27/2010	10:03:26 AM	SiCl4 pre valve closed
5/27/2010	10:03:26 AM	SiCl4 post valve closed
5/27/2010	10:03:26 AM	Main Vac valve closed
5/27/2010	10:03:26 AM	Bypass valve closed
5/27/2010	10:03:26 AM	Bubbler valve closed
5/27/2010	10:03:26 AM	Helium MFC set to  0.000000
5/27/2010	10:03:26 AM	H2 MFC set to  0.000000
5/27/2010	10:03:26 AM	BCl3 MFC set to  0.000000
5/27/2010	10:03:26 AM	PHl3 MFC set to  0.000000
5/27/2010	10:03:26 AM	SiCl4 MFC set to  0.000000
5/27/2010	10:03:26 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	10:03:27 AM	Tube furnace set to 0
5/27/2010	10:03:42 AM	Helium valve closed
5/27/2010	10:03:42 AM	H2 valve closed
5/27/2010	10:03:42 AM	BCl3 valve closed
5/27/2010	10:03:42 AM	PH3 valve closed
5/27/2010	10:03:42 AM	SiCl4 pre valve closed
5/27/2010	10:03:42 AM	SiCl4 post valve closed
5/27/2010	10:03:42 AM	Main Vac valve closed
5/27/2010	10:03:42 AM	Bubbler valve closed
5/27/2010	10:03:42 AM	Bypass valve opened
5/27/2010	10:03:42 AM	Helium MFC set to  0.000000
5/27/2010	10:03:42 AM	H2 MFC set to  0.000000
5/27/2010	10:03:42 AM	BCl3 MFC set to  0.000000
5/27/2010	10:03:42 AM	PHl3 MFC set to  0.000000
5/27/2010	10:03:42 AM	SiCl4 MFC set to  0.000000
5/27/2010	10:03:42 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	10:03:42 AM	Tube furnace set to 0
5/27/2010	10:04:15 AM	Helium valve closed
5/27/2010	10:04:15 AM	H2 valve closed
5/27/2010	10:04:15 AM	BCl3 valve closed
5/27/2010	10:04:15 AM	PH3 valve closed
5/27/2010	10:04:15 AM	SiCl4 pre valve closed
5/27/2010	10:04:15 AM	SiCl4 post valve closed
5/27/2010	10:04:15 AM	Bubbler valve closed
5/27/2010	10:04:15 AM	Main Vac valve opened
5/27/2010	10:04:15 AM	Bypass valve opened
5/27/2010	10:04:15 AM	Helium MFC set to  0.000000
5/27/2010	10:04:15 AM	H2 MFC set to  0.000000
5/27/2010	10:04:15 AM	BCl3 MFC set to  0.000000
5/27/2010	10:04:15 AM	PHl3 MFC set to  0.000000
5/27/2010	10:04:15 AM	SiCl4 MFC set to  0.000000
5/27/2010	10:04:15 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	10:04:15 AM	Tube furnace set to 0
5/27/2010	10:09:15 AM	Helium valve closed
5/27/2010	10:09:15 AM	H2 valve closed
5/27/2010	10:09:15 AM	BCl3 valve closed
5/27/2010	10:09:15 AM	PH3 valve closed
5/27/2010	10:09:15 AM	SiCl4 pre valve closed
5/27/2010	10:09:15 AM	SiCl4 post valve closed
5/27/2010	10:09:15 AM	Bubbler valve closed
5/27/2010	10:09:15 AM	Main Vac valve opened
5/27/2010	10:09:15 AM	Bypass valve opened
5/27/2010	10:09:15 AM	Helium MFC set to  0.000000
5/27/2010	10:09:15 AM	H2 MFC set to  0.000000
5/27/2010	10:09:15 AM	BCl3 MFC set to  0.000000
5/27/2010	10:09:15 AM	PHl3 MFC set to  0.000000
5/27/2010	10:09:15 AM	SiCl4 MFC set to  0.000000
5/27/2010	10:09:15 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	10:09:15 AM	Tube furnace set to 0
5/27/2010	10:09:16 AM	Run finished at 10:09 AM
5/27/2010	10:09:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/27/2010	10:34:44 AM	Bypass valve closed
5/27/2010	10:34:45 AM	Main Vac valve closed
5/27/2010	10:35:00 AM	Bypass valve opened
5/27/2010	10:35:00 AM	Main Vac valve opened
5/27/2010	10:35:32 AM	Tube furnace set to 100
5/27/2010	10:37:38 AM	Recipe started at 10:37 AM
5/27/2010	10:37:38 AM	Helium valve closed
5/27/2010	10:37:38 AM	BCl3 valve closed
5/27/2010	10:37:38 AM	PH3 valve closed
5/27/2010	10:37:38 AM	SiCl4 pre valve closed
5/27/2010	10:37:38 AM	SiCl4 post valve closed
5/27/2010	10:37:38 AM	Main Vac valve closed
5/27/2010	10:37:38 AM	Bypass valve closed
5/27/2010	10:37:38 AM	Bubbler valve closed
5/27/2010	10:37:38 AM	H2 valve opened
5/27/2010	10:37:38 AM	Helium MFC set to  0.000000
5/27/2010	10:37:38 AM	H2 MFC set to  500.000000
5/27/2010	10:37:38 AM	BCl3 MFC set to  0.000000
5/27/2010	10:37:38 AM	PHl3 MFC set to  0.000000
5/27/2010	10:37:38 AM	SiCl4 MFC set to  0.000000
5/27/2010	10:37:38 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	10:37:38 AM	Tube furnace set to 0
5/27/2010	10:38:50 AM	Run aborted at 10:38 AM
5/27/2010	10:38:50 AM	Helium valve closed
5/27/2010	10:38:50 AM	H2 valve closed
5/27/2010	10:38:50 AM	BCl3 valve closed
5/27/2010	10:38:50 AM	PH3 valve closed
5/27/2010	10:38:50 AM	SiCl4 pre valve closed
5/27/2010	10:38:50 AM	SiCl4 post valve closed
5/27/2010	10:38:50 AM	Bypass valve closed
5/27/2010	10:38:50 AM	Main Vac valve closed
5/27/2010	10:38:50 AM	Bubbler valve closed
5/27/2010	10:38:50 AM	Helium MFC set to  0.000000
5/27/2010	10:38:50 AM	H2 MFC set to  0.000000
5/27/2010	10:38:50 AM	BCl3 MFC set to  0.000000
5/27/2010	10:38:50 AM	PHl3 MFC set to  0.000000
5/27/2010	10:38:50 AM	SiCl4 MFC set to  0.000000
5/27/2010	10:38:50 AM	Tube furnace set to 0
5/27/2010	10:39:35 AM	H2 valve closed
5/27/2010	10:39:39 AM	H2 MFC set to  0.000000
5/27/2010	10:39:44 AM	Recipe started at 10:39 AM
5/27/2010	10:39:44 AM	Helium valve closed
5/27/2010	10:39:44 AM	BCl3 valve closed
5/27/2010	10:39:44 AM	PH3 valve closed
5/27/2010	10:39:44 AM	SiCl4 pre valve closed
5/27/2010	10:39:44 AM	SiCl4 post valve closed
5/27/2010	10:39:44 AM	Main Vac valve closed
5/27/2010	10:39:44 AM	Bypass valve closed
5/27/2010	10:39:44 AM	Bubbler valve closed
5/27/2010	10:39:44 AM	H2 valve opened
5/27/2010	10:39:44 AM	Helium MFC set to  0.000000
5/27/2010	10:39:44 AM	H2 MFC set to  500.000000
5/27/2010	10:39:44 AM	BCl3 MFC set to  0.000000
5/27/2010	10:39:44 AM	PHl3 MFC set to  0.000000
5/27/2010	10:39:44 AM	SiCl4 MFC set to  0.000000
5/27/2010	10:39:44 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	10:39:44 AM	Tube furnace set to 0
5/27/2010	10:39:52 AM	Helium valve closed
5/27/2010	10:39:52 AM	BCl3 valve closed
5/27/2010	10:39:52 AM	PH3 valve closed
5/27/2010	10:39:52 AM	SiCl4 pre valve closed
5/27/2010	10:39:52 AM	SiCl4 post valve closed
5/27/2010	10:39:52 AM	Main Vac valve closed
5/27/2010	10:39:52 AM	Bypass valve closed
5/27/2010	10:39:52 AM	H2 valve opened
5/27/2010	10:39:52 AM	Bubbler valve opened
5/27/2010	10:39:52 AM	Helium MFC set to  0.000000
5/27/2010	10:39:52 AM	H2 MFC set to  500.000000
5/27/2010	10:39:52 AM	BCl3 MFC set to  0.000000
5/27/2010	10:39:52 AM	PHl3 MFC set to  0.000000
5/27/2010	10:39:52 AM	SiCl4 MFC set to  0.000000
5/27/2010	10:39:52 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	10:39:52 AM	Tube furnace set to 1000
5/27/2010	10:59:52 AM	Helium valve closed
5/27/2010	10:59:52 AM	PH3 valve closed
5/27/2010	10:59:52 AM	Main Vac valve closed
5/27/2010	10:59:52 AM	Bypass valve closed
5/27/2010	10:59:52 AM	H2 valve opened
5/27/2010	10:59:52 AM	BCl3 valve opened
5/27/2010	10:59:52 AM	SiCl4 pre valve opened
5/27/2010	10:59:52 AM	SiCl4 post valve opened
5/27/2010	10:59:52 AM	Bubbler valve opened
5/27/2010	10:59:52 AM	Helium MFC set to  0.000000
5/27/2010	10:59:52 AM	H2 MFC set to  500.000000
5/27/2010	10:59:52 AM	BCl3 MFC set to  35.000000
5/27/2010	10:59:52 AM	PHl3 MFC set to  0.000000
5/27/2010	10:59:52 AM	SiCl4 MFC set to  50.000000
5/27/2010	10:59:52 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	10:59:53 AM	Tube furnace set to 1000
5/27/2010	11:14:53 AM	H2 valve closed
5/27/2010	11:14:53 AM	BCl3 valve closed
5/27/2010	11:14:53 AM	PH3 valve closed
5/27/2010	11:14:53 AM	SiCl4 pre valve closed
5/27/2010	11:14:53 AM	SiCl4 post valve closed
5/27/2010	11:14:53 AM	Main Vac valve closed
5/27/2010	11:14:53 AM	Bypass valve closed
5/27/2010	11:14:53 AM	Helium valve opened
5/27/2010	11:14:53 AM	Bubbler valve opened
5/27/2010	11:14:53 AM	Helium MFC set to  500.000000
5/27/2010	11:14:53 AM	H2 MFC set to  0.000000
5/27/2010	11:14:53 AM	BCl3 MFC set to  0.000000
5/27/2010	11:14:53 AM	PHl3 MFC set to  0.000000
5/27/2010	11:14:53 AM	SiCl4 MFC set to  0.000000
5/27/2010	11:14:53 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	11:14:53 AM	Tube furnace set to 0
5/27/2010	11:34:53 AM	Helium valve closed
5/27/2010	11:34:53 AM	H2 valve closed
5/27/2010	11:34:53 AM	BCl3 valve closed
5/27/2010	11:34:53 AM	PH3 valve closed
5/27/2010	11:34:53 AM	SiCl4 pre valve closed
5/27/2010	11:34:53 AM	SiCl4 post valve closed
5/27/2010	11:34:53 AM	Main Vac valve closed
5/27/2010	11:34:53 AM	Bypass valve closed
5/27/2010	11:34:53 AM	Bubbler valve closed
5/27/2010	11:34:53 AM	Helium MFC set to  0.000000
5/27/2010	11:34:53 AM	H2 MFC set to  0.000000
5/27/2010	11:34:53 AM	BCl3 MFC set to  0.000000
5/27/2010	11:34:53 AM	PHl3 MFC set to  0.000000
5/27/2010	11:34:53 AM	SiCl4 MFC set to  0.000000
5/27/2010	11:34:53 AM	Bypass solenoid MFC set to  0.000000
5/27/2010	11:34:53 AM	Tube furnace set to 0
5/27/2010	11:34:53 AM	Run finished at 11:34 AM
5/27/2010	2:44:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	2:44:53 PM	Recipe started at 2:44 PM
5/27/2010	2:44:53 PM	Helium valve closed
5/27/2010	2:44:53 PM	H2 valve closed
5/27/2010	2:44:53 PM	BCl3 valve closed
5/27/2010	2:44:53 PM	PH3 valve closed
5/27/2010	2:44:53 PM	SiCl4 pre valve closed
5/27/2010	2:44:53 PM	SiCl4 post valve closed
5/27/2010	2:44:53 PM	Main Vac valve closed
5/27/2010	2:44:53 PM	Bubbler valve closed
5/27/2010	2:44:53 PM	Bypass valve opened
5/27/2010	2:44:53 PM	Helium MFC set to  0.000000
5/27/2010	2:44:53 PM	H2 MFC set to  0.000000
5/27/2010	2:44:53 PM	BCl3 MFC set to  0.000000
5/27/2010	2:44:53 PM	PHl3 MFC set to  0.000000
5/27/2010	2:44:53 PM	SiCl4 MFC set to  0.000000
5/27/2010	2:44:53 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	2:44:53 PM	Tube furnace set to 0
5/27/2010	2:45:40 PM	Helium valve closed
5/27/2010	2:45:40 PM	H2 valve closed
5/27/2010	2:45:40 PM	BCl3 valve closed
5/27/2010	2:45:40 PM	PH3 valve closed
5/27/2010	2:45:40 PM	SiCl4 pre valve closed
5/27/2010	2:45:40 PM	SiCl4 post valve closed
5/27/2010	2:45:40 PM	Bubbler valve closed
5/27/2010	2:45:40 PM	Main Vac valve opened
5/27/2010	2:45:40 PM	Bypass valve opened
5/27/2010	2:45:40 PM	Helium MFC set to  0.000000
5/27/2010	2:45:40 PM	H2 MFC set to  0.000000
5/27/2010	2:45:40 PM	BCl3 MFC set to  0.000000
5/27/2010	2:45:40 PM	PHl3 MFC set to  0.000000
5/27/2010	2:45:40 PM	SiCl4 MFC set to  0.000000
5/27/2010	2:45:40 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	2:45:41 PM	Tube furnace set to 0
5/27/2010	2:45:41 PM	Run finished at 2:45 PM
5/27/2010	2:45:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	2:51:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/27/2010	2:51:05 PM	Recipe started at 2:51 PM
5/27/2010	2:51:05 PM	H2 valve closed
5/27/2010	2:51:05 PM	BCl3 valve closed
5/27/2010	2:51:05 PM	PH3 valve closed
5/27/2010	2:51:05 PM	SiCl4 pre valve closed
5/27/2010	2:51:05 PM	SiCl4 post valve closed
5/27/2010	2:51:05 PM	Main Vac valve closed
5/27/2010	2:51:05 PM	Bypass valve closed
5/27/2010	2:51:05 PM	Bubbler valve closed
5/27/2010	2:51:05 PM	Helium valve opened
5/27/2010	2:51:05 PM	Helium MFC set to  500.000000
5/27/2010	2:51:05 PM	H2 MFC set to  0.000000
5/27/2010	2:51:05 PM	BCl3 MFC set to  0.000000
5/27/2010	2:51:05 PM	PHl3 MFC set to  0.000000
5/27/2010	2:51:05 PM	SiCl4 MFC set to  0.000000
5/27/2010	2:51:05 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	2:51:05 PM	Tube furnace set to 0
5/27/2010	2:52:28 PM	Helium valve closed
5/27/2010	2:52:28 PM	H2 valve closed
5/27/2010	2:52:28 PM	BCl3 valve closed
5/27/2010	2:52:28 PM	PH3 valve closed
5/27/2010	2:52:28 PM	SiCl4 pre valve closed
5/27/2010	2:52:28 PM	SiCl4 post valve closed
5/27/2010	2:52:28 PM	Main Vac valve closed
5/27/2010	2:52:28 PM	Bypass valve closed
5/27/2010	2:52:28 PM	Bubbler valve closed
5/27/2010	2:52:28 PM	Helium MFC set to  0.000000
5/27/2010	2:52:28 PM	H2 MFC set to  0.000000
5/27/2010	2:52:28 PM	BCl3 MFC set to  0.000000
5/27/2010	2:52:28 PM	PHl3 MFC set to  0.000000
5/27/2010	2:52:28 PM	SiCl4 MFC set to  0.000000
5/27/2010	2:52:28 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	2:52:28 PM	Tube furnace set to 0
5/27/2010	2:52:43 PM	Helium valve closed
5/27/2010	2:52:43 PM	H2 valve closed
5/27/2010	2:52:43 PM	BCl3 valve closed
5/27/2010	2:52:43 PM	PH3 valve closed
5/27/2010	2:52:43 PM	SiCl4 pre valve closed
5/27/2010	2:52:43 PM	SiCl4 post valve closed
5/27/2010	2:52:43 PM	Main Vac valve closed
5/27/2010	2:52:43 PM	Bubbler valve closed
5/27/2010	2:52:43 PM	Bypass valve opened
5/27/2010	2:52:43 PM	Helium MFC set to  0.000000
5/27/2010	2:52:43 PM	H2 MFC set to  0.000000
5/27/2010	2:52:43 PM	BCl3 MFC set to  0.000000
5/27/2010	2:52:43 PM	PHl3 MFC set to  0.000000
5/27/2010	2:52:43 PM	SiCl4 MFC set to  0.000000
5/27/2010	2:52:43 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	2:52:43 PM	Tube furnace set to 0
5/27/2010	2:53:16 PM	Helium valve closed
5/27/2010	2:53:16 PM	H2 valve closed
5/27/2010	2:53:16 PM	BCl3 valve closed
5/27/2010	2:53:16 PM	PH3 valve closed
5/27/2010	2:53:16 PM	SiCl4 pre valve closed
5/27/2010	2:53:16 PM	SiCl4 post valve closed
5/27/2010	2:53:16 PM	Bubbler valve closed
5/27/2010	2:53:16 PM	Main Vac valve opened
5/27/2010	2:53:16 PM	Bypass valve opened
5/27/2010	2:53:16 PM	Helium MFC set to  0.000000
5/27/2010	2:53:16 PM	H2 MFC set to  0.000000
5/27/2010	2:53:16 PM	BCl3 MFC set to  0.000000
5/27/2010	2:53:16 PM	PHl3 MFC set to  0.000000
5/27/2010	2:53:16 PM	SiCl4 MFC set to  0.000000
5/27/2010	2:53:16 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	2:53:16 PM	Tube furnace set to 0
5/27/2010	2:58:16 PM	H2 valve closed
5/27/2010	2:58:16 PM	BCl3 valve closed
5/27/2010	2:58:16 PM	PH3 valve closed
5/27/2010	2:58:16 PM	SiCl4 pre valve closed
5/27/2010	2:58:16 PM	SiCl4 post valve closed
5/27/2010	2:58:16 PM	Main Vac valve closed
5/27/2010	2:58:16 PM	Bypass valve closed
5/27/2010	2:58:16 PM	Bubbler valve closed
5/27/2010	2:58:16 PM	Helium valve opened
5/27/2010	2:58:16 PM	Helium MFC set to  500.000000
5/27/2010	2:58:16 PM	H2 MFC set to  0.000000
5/27/2010	2:58:16 PM	BCl3 MFC set to  0.000000
5/27/2010	2:58:16 PM	PHl3 MFC set to  0.000000
5/27/2010	2:58:16 PM	SiCl4 MFC set to  0.000000
5/27/2010	2:58:16 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	2:58:16 PM	Tube furnace set to 0
5/27/2010	2:59:39 PM	Helium valve closed
5/27/2010	2:59:39 PM	H2 valve closed
5/27/2010	2:59:39 PM	BCl3 valve closed
5/27/2010	2:59:39 PM	PH3 valve closed
5/27/2010	2:59:39 PM	SiCl4 pre valve closed
5/27/2010	2:59:39 PM	SiCl4 post valve closed
5/27/2010	2:59:39 PM	Main Vac valve closed
5/27/2010	2:59:39 PM	Bypass valve closed
5/27/2010	2:59:39 PM	Bubbler valve closed
5/27/2010	2:59:39 PM	Helium MFC set to  0.000000
5/27/2010	2:59:39 PM	H2 MFC set to  0.000000
5/27/2010	2:59:39 PM	BCl3 MFC set to  0.000000
5/27/2010	2:59:39 PM	PHl3 MFC set to  0.000000
5/27/2010	2:59:39 PM	SiCl4 MFC set to  0.000000
5/27/2010	2:59:39 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	2:59:39 PM	Tube furnace set to 0
5/27/2010	2:59:54 PM	Helium valve closed
5/27/2010	2:59:54 PM	H2 valve closed
5/27/2010	2:59:54 PM	BCl3 valve closed
5/27/2010	2:59:54 PM	PH3 valve closed
5/27/2010	2:59:54 PM	SiCl4 pre valve closed
5/27/2010	2:59:54 PM	SiCl4 post valve closed
5/27/2010	2:59:54 PM	Main Vac valve closed
5/27/2010	2:59:54 PM	Bubbler valve closed
5/27/2010	2:59:54 PM	Bypass valve opened
5/27/2010	2:59:54 PM	Helium MFC set to  0.000000
5/27/2010	2:59:54 PM	H2 MFC set to  0.000000
5/27/2010	2:59:54 PM	BCl3 MFC set to  0.000000
5/27/2010	2:59:54 PM	PHl3 MFC set to  0.000000
5/27/2010	2:59:54 PM	SiCl4 MFC set to  0.000000
5/27/2010	2:59:54 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	2:59:54 PM	Tube furnace set to 0
5/27/2010	3:00:27 PM	Helium valve closed
5/27/2010	3:00:27 PM	H2 valve closed
5/27/2010	3:00:27 PM	BCl3 valve closed
5/27/2010	3:00:27 PM	PH3 valve closed
5/27/2010	3:00:27 PM	SiCl4 pre valve closed
5/27/2010	3:00:27 PM	SiCl4 post valve closed
5/27/2010	3:00:27 PM	Bubbler valve closed
5/27/2010	3:00:27 PM	Main Vac valve opened
5/27/2010	3:00:27 PM	Bypass valve opened
5/27/2010	3:00:27 PM	Helium MFC set to  0.000000
5/27/2010	3:00:27 PM	H2 MFC set to  0.000000
5/27/2010	3:00:27 PM	BCl3 MFC set to  0.000000
5/27/2010	3:00:27 PM	PHl3 MFC set to  0.000000
5/27/2010	3:00:27 PM	SiCl4 MFC set to  0.000000
5/27/2010	3:00:27 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	3:00:28 PM	Tube furnace set to 0
5/27/2010	3:05:28 PM	H2 valve closed
5/27/2010	3:05:28 PM	BCl3 valve closed
5/27/2010	3:05:28 PM	PH3 valve closed
5/27/2010	3:05:28 PM	SiCl4 pre valve closed
5/27/2010	3:05:28 PM	SiCl4 post valve closed
5/27/2010	3:05:28 PM	Main Vac valve closed
5/27/2010	3:05:28 PM	Bypass valve closed
5/27/2010	3:05:28 PM	Bubbler valve closed
5/27/2010	3:05:28 PM	Helium valve opened
5/27/2010	3:05:28 PM	Helium MFC set to  500.000000
5/27/2010	3:05:28 PM	H2 MFC set to  0.000000
5/27/2010	3:05:28 PM	BCl3 MFC set to  0.000000
5/27/2010	3:05:28 PM	PHl3 MFC set to  0.000000
5/27/2010	3:05:28 PM	SiCl4 MFC set to  0.000000
5/27/2010	3:05:28 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	3:05:28 PM	Tube furnace set to 0
5/27/2010	3:06:50 PM	Helium valve closed
5/27/2010	3:06:50 PM	H2 valve closed
5/27/2010	3:06:50 PM	BCl3 valve closed
5/27/2010	3:06:50 PM	PH3 valve closed
5/27/2010	3:06:50 PM	SiCl4 pre valve closed
5/27/2010	3:06:50 PM	SiCl4 post valve closed
5/27/2010	3:06:50 PM	Main Vac valve closed
5/27/2010	3:06:50 PM	Bypass valve closed
5/27/2010	3:06:50 PM	Bubbler valve closed
5/27/2010	3:06:50 PM	Helium MFC set to  0.000000
5/27/2010	3:06:50 PM	H2 MFC set to  0.000000
5/27/2010	3:06:50 PM	BCl3 MFC set to  0.000000
5/27/2010	3:06:50 PM	PHl3 MFC set to  0.000000
5/27/2010	3:06:50 PM	SiCl4 MFC set to  0.000000
5/27/2010	3:06:50 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	3:06:50 PM	Tube furnace set to 0
5/27/2010	3:07:05 PM	Helium valve closed
5/27/2010	3:07:05 PM	H2 valve closed
5/27/2010	3:07:05 PM	BCl3 valve closed
5/27/2010	3:07:05 PM	PH3 valve closed
5/27/2010	3:07:05 PM	SiCl4 pre valve closed
5/27/2010	3:07:05 PM	SiCl4 post valve closed
5/27/2010	3:07:05 PM	Main Vac valve closed
5/27/2010	3:07:05 PM	Bubbler valve closed
5/27/2010	3:07:05 PM	Bypass valve opened
5/27/2010	3:07:05 PM	Helium MFC set to  0.000000
5/27/2010	3:07:05 PM	H2 MFC set to  0.000000
5/27/2010	3:07:05 PM	BCl3 MFC set to  0.000000
5/27/2010	3:07:05 PM	PHl3 MFC set to  0.000000
5/27/2010	3:07:05 PM	SiCl4 MFC set to  0.000000
5/27/2010	3:07:05 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	3:07:05 PM	Tube furnace set to 0
5/27/2010	3:07:38 PM	Helium valve closed
5/27/2010	3:07:38 PM	H2 valve closed
5/27/2010	3:07:38 PM	BCl3 valve closed
5/27/2010	3:07:38 PM	PH3 valve closed
5/27/2010	3:07:38 PM	SiCl4 pre valve closed
5/27/2010	3:07:38 PM	SiCl4 post valve closed
5/27/2010	3:07:38 PM	Bubbler valve closed
5/27/2010	3:07:38 PM	Main Vac valve opened
5/27/2010	3:07:38 PM	Bypass valve opened
5/27/2010	3:07:38 PM	Helium MFC set to  0.000000
5/27/2010	3:07:38 PM	H2 MFC set to  0.000000
5/27/2010	3:07:38 PM	BCl3 MFC set to  0.000000
5/27/2010	3:07:38 PM	PHl3 MFC set to  0.000000
5/27/2010	3:07:38 PM	SiCl4 MFC set to  0.000000
5/27/2010	3:07:38 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	3:07:39 PM	Tube furnace set to 0
5/27/2010	3:12:39 PM	Helium valve closed
5/27/2010	3:12:39 PM	H2 valve closed
5/27/2010	3:12:39 PM	BCl3 valve closed
5/27/2010	3:12:39 PM	PH3 valve closed
5/27/2010	3:12:39 PM	SiCl4 pre valve closed
5/27/2010	3:12:39 PM	SiCl4 post valve closed
5/27/2010	3:12:39 PM	Bubbler valve closed
5/27/2010	3:12:39 PM	Main Vac valve opened
5/27/2010	3:12:39 PM	Bypass valve opened
5/27/2010	3:12:39 PM	Helium MFC set to  0.000000
5/27/2010	3:12:39 PM	H2 MFC set to  0.000000
5/27/2010	3:12:39 PM	BCl3 MFC set to  0.000000
5/27/2010	3:12:39 PM	PHl3 MFC set to  0.000000
5/27/2010	3:12:39 PM	SiCl4 MFC set to  0.000000
5/27/2010	3:12:39 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	3:12:39 PM	Tube furnace set to 0
5/27/2010	3:12:40 PM	Run finished at 3:12 PM
5/27/2010	3:12:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/27/2010	4:09:57 PM	Tube furnace set to 100
5/27/2010	4:10:26 PM	Bypass valve closed
5/27/2010	4:10:26 PM	Main Vac valve closed
5/27/2010	4:10:35 PM	Main Vac valve opened
5/27/2010	4:10:35 PM	Bypass valve opened
5/27/2010	4:12:54 PM	Tube furnace set to 0
5/27/2010	4:13:04 PM	Recipe started at 4:13 PM
5/27/2010	4:13:04 PM	Helium valve closed
5/27/2010	4:13:04 PM	BCl3 valve closed
5/27/2010	4:13:04 PM	PH3 valve closed
5/27/2010	4:13:04 PM	SiCl4 pre valve closed
5/27/2010	4:13:04 PM	SiCl4 post valve closed
5/27/2010	4:13:04 PM	Main Vac valve closed
5/27/2010	4:13:04 PM	Bypass valve closed
5/27/2010	4:13:04 PM	Bubbler valve closed
5/27/2010	4:13:04 PM	H2 valve opened
5/27/2010	4:13:04 PM	Helium MFC set to  0.000000
5/27/2010	4:13:04 PM	H2 MFC set to  500.000000
5/27/2010	4:13:04 PM	BCl3 MFC set to  0.000000
5/27/2010	4:13:04 PM	PHl3 MFC set to  0.000000
5/27/2010	4:13:04 PM	SiCl4 MFC set to  0.000000
5/27/2010	4:13:04 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	4:13:05 PM	Tube furnace set to 0
5/27/2010	4:14:26 PM	Helium valve closed
5/27/2010	4:14:26 PM	BCl3 valve closed
5/27/2010	4:14:26 PM	PH3 valve closed
5/27/2010	4:14:26 PM	SiCl4 pre valve closed
5/27/2010	4:14:26 PM	SiCl4 post valve closed
5/27/2010	4:14:26 PM	Main Vac valve closed
5/27/2010	4:14:26 PM	Bypass valve closed
5/27/2010	4:14:26 PM	H2 valve opened
5/27/2010	4:14:26 PM	Bubbler valve opened
5/27/2010	4:14:26 PM	Helium MFC set to  0.000000
5/27/2010	4:14:26 PM	H2 MFC set to  500.000000
5/27/2010	4:14:26 PM	BCl3 MFC set to  0.000000
5/27/2010	4:14:26 PM	PHl3 MFC set to  0.000000
5/27/2010	4:14:26 PM	SiCl4 MFC set to  0.000000
5/27/2010	4:14:26 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	4:14:26 PM	Tube furnace set to 1000
5/27/2010	4:20:06 PM	Run aborted at 4:20 PM
5/27/2010	4:20:06 PM	Helium valve closed
5/27/2010	4:20:06 PM	H2 valve closed
5/27/2010	4:20:06 PM	BCl3 valve closed
5/27/2010	4:20:06 PM	PH3 valve closed
5/27/2010	4:20:06 PM	SiCl4 pre valve closed
5/27/2010	4:20:06 PM	SiCl4 post valve closed
5/27/2010	4:20:06 PM	Bypass valve closed
5/27/2010	4:20:06 PM	Main Vac valve closed
5/27/2010	4:20:06 PM	Bubbler valve closed
5/27/2010	4:20:06 PM	Helium MFC set to  0.000000
5/27/2010	4:20:06 PM	H2 MFC set to  0.000000
5/27/2010	4:20:06 PM	BCl3 MFC set to  0.000000
5/27/2010	4:20:06 PM	PHl3 MFC set to  0.000000
5/27/2010	4:20:06 PM	SiCl4 MFC set to  0.000000
5/27/2010	4:20:06 PM	Tube furnace set to 0
5/27/2010	4:20:17 PM	Recipe started at 4:20 PM
5/27/2010	4:20:17 PM	Helium valve closed
5/27/2010	4:20:17 PM	BCl3 valve closed
5/27/2010	4:20:17 PM	PH3 valve closed
5/27/2010	4:20:17 PM	SiCl4 pre valve closed
5/27/2010	4:20:17 PM	SiCl4 post valve closed
5/27/2010	4:20:17 PM	Main Vac valve closed
5/27/2010	4:20:17 PM	Bypass valve closed
5/27/2010	4:20:17 PM	Bubbler valve closed
5/27/2010	4:20:17 PM	H2 valve opened
5/27/2010	4:20:17 PM	Helium MFC set to  0.000000
5/27/2010	4:20:17 PM	H2 MFC set to  500.000000
5/27/2010	4:20:17 PM	BCl3 MFC set to  0.000000
5/27/2010	4:20:17 PM	PHl3 MFC set to  0.000000
5/27/2010	4:20:17 PM	SiCl4 MFC set to  0.000000
5/27/2010	4:20:17 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	4:20:17 PM	Tube furnace set to 0
5/27/2010	4:20:19 PM	Helium valve closed
5/27/2010	4:20:19 PM	BCl3 valve closed
5/27/2010	4:20:19 PM	PH3 valve closed
5/27/2010	4:20:19 PM	SiCl4 pre valve closed
5/27/2010	4:20:19 PM	SiCl4 post valve closed
5/27/2010	4:20:19 PM	Main Vac valve closed
5/27/2010	4:20:19 PM	Bypass valve closed
5/27/2010	4:20:19 PM	H2 valve opened
5/27/2010	4:20:19 PM	Bubbler valve opened
5/27/2010	4:20:19 PM	Helium MFC set to  0.000000
5/27/2010	4:20:19 PM	H2 MFC set to  500.000000
5/27/2010	4:20:19 PM	BCl3 MFC set to  0.000000
5/27/2010	4:20:19 PM	PHl3 MFC set to  0.000000
5/27/2010	4:20:19 PM	SiCl4 MFC set to  0.000000
5/27/2010	4:20:19 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	4:20:19 PM	Tube furnace set to 1000
5/27/2010	4:23:51 PM	Helium valve closed
5/27/2010	4:23:51 PM	PH3 valve closed
5/27/2010	4:23:51 PM	Main Vac valve closed
5/27/2010	4:23:52 PM	Bypass valve closed
5/27/2010	4:23:52 PM	H2 valve opened
5/27/2010	4:23:52 PM	BCl3 valve opened
5/27/2010	4:23:52 PM	SiCl4 pre valve opened
5/27/2010	4:23:52 PM	SiCl4 post valve opened
5/27/2010	4:23:52 PM	Bubbler valve opened
5/27/2010	4:23:52 PM	Helium MFC set to  0.000000
5/27/2010	4:23:52 PM	H2 MFC set to  500.000000
5/27/2010	4:23:52 PM	BCl3 MFC set to  35.000000
5/27/2010	4:23:52 PM	PHl3 MFC set to  0.000000
5/27/2010	4:23:52 PM	SiCl4 MFC set to  50.000000
5/27/2010	4:23:52 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	4:23:52 PM	Tube furnace set to 1000
5/27/2010	4:27:13 PM	Helium valve closed
5/27/2010	4:27:13 PM	PH3 valve closed
5/27/2010	4:27:13 PM	Main Vac valve closed
5/27/2010	4:27:13 PM	Bypass valve closed
5/27/2010	4:27:13 PM	H2 valve opened
5/27/2010	4:27:13 PM	BCl3 valve opened
5/27/2010	4:27:13 PM	SiCl4 pre valve opened
5/27/2010	4:27:13 PM	SiCl4 post valve opened
5/27/2010	4:27:13 PM	Bubbler valve opened
5/27/2010	4:27:13 PM	Helium MFC set to  0.000000
5/27/2010	4:27:13 PM	H2 MFC set to  500.000000
5/27/2010	4:27:13 PM	BCl3 MFC set to  35.000000
5/27/2010	4:27:13 PM	PHl3 MFC set to  0.000000
5/27/2010	4:27:13 PM	SiCl4 MFC set to  50.000000
5/27/2010	4:27:13 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	4:27:14 PM	Tube furnace set to 1000
5/27/2010	4:32:14 PM	H2 valve closed
5/27/2010	4:32:14 PM	BCl3 valve closed
5/27/2010	4:32:14 PM	PH3 valve closed
5/27/2010	4:32:14 PM	SiCl4 pre valve closed
5/27/2010	4:32:14 PM	SiCl4 post valve closed
5/27/2010	4:32:14 PM	Main Vac valve closed
5/27/2010	4:32:14 PM	Bypass valve closed
5/27/2010	4:32:14 PM	Helium valve opened
5/27/2010	4:32:14 PM	Bubbler valve opened
5/27/2010	4:32:14 PM	Helium MFC set to  500.000000
5/27/2010	4:32:14 PM	H2 MFC set to  0.000000
5/27/2010	4:32:14 PM	BCl3 MFC set to  0.000000
5/27/2010	4:32:14 PM	PHl3 MFC set to  0.000000
5/27/2010	4:32:14 PM	SiCl4 MFC set to  0.000000
5/27/2010	4:32:14 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	4:32:14 PM	Tube furnace set to 0
5/27/2010	4:52:14 PM	Helium valve closed
5/27/2010	4:52:14 PM	H2 valve closed
5/27/2010	4:52:14 PM	BCl3 valve closed
5/27/2010	4:52:14 PM	PH3 valve closed
5/27/2010	4:52:14 PM	SiCl4 pre valve closed
5/27/2010	4:52:14 PM	SiCl4 post valve closed
5/27/2010	4:52:14 PM	Main Vac valve closed
5/27/2010	4:52:14 PM	Bypass valve closed
5/27/2010	4:52:14 PM	Bubbler valve closed
5/27/2010	4:52:14 PM	Helium MFC set to  0.000000
5/27/2010	4:52:14 PM	H2 MFC set to  0.000000
5/27/2010	4:52:14 PM	BCl3 MFC set to  0.000000
5/27/2010	4:52:14 PM	PHl3 MFC set to  0.000000
5/27/2010	4:52:14 PM	SiCl4 MFC set to  0.000000
5/27/2010	4:52:14 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	4:52:14 PM	Tube furnace set to 0
5/27/2010	4:52:14 PM	Run finished at 4:52 PM
5/27/2010	6:52:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	6:52:17 PM	Recipe started at 6:52 PM
5/27/2010	6:52:17 PM	Helium valve closed
5/27/2010	6:52:17 PM	H2 valve closed
5/27/2010	6:52:17 PM	BCl3 valve closed
5/27/2010	6:52:17 PM	PH3 valve closed
5/27/2010	6:52:17 PM	SiCl4 pre valve closed
5/27/2010	6:52:17 PM	SiCl4 post valve closed
5/27/2010	6:52:17 PM	Main Vac valve closed
5/27/2010	6:52:17 PM	Bubbler valve closed
5/27/2010	6:52:17 PM	Bypass valve opened
5/27/2010	6:52:17 PM	Helium MFC set to  0.000000
5/27/2010	6:52:17 PM	H2 MFC set to  0.000000
5/27/2010	6:52:17 PM	BCl3 MFC set to  0.000000
5/27/2010	6:52:17 PM	PHl3 MFC set to  0.000000
5/27/2010	6:52:17 PM	SiCl4 MFC set to  0.000000
5/27/2010	6:52:17 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	6:52:17 PM	Tube furnace set to 0
5/27/2010	6:53:05 PM	Helium valve closed
5/27/2010	6:53:05 PM	H2 valve closed
5/27/2010	6:53:05 PM	BCl3 valve closed
5/27/2010	6:53:05 PM	PH3 valve closed
5/27/2010	6:53:05 PM	SiCl4 pre valve closed
5/27/2010	6:53:05 PM	SiCl4 post valve closed
5/27/2010	6:53:05 PM	Bubbler valve closed
5/27/2010	6:53:05 PM	Main Vac valve opened
5/27/2010	6:53:05 PM	Bypass valve opened
5/27/2010	6:53:05 PM	Helium MFC set to  0.000000
5/27/2010	6:53:05 PM	H2 MFC set to  0.000000
5/27/2010	6:53:05 PM	BCl3 MFC set to  0.000000
5/27/2010	6:53:05 PM	PHl3 MFC set to  0.000000
5/27/2010	6:53:05 PM	SiCl4 MFC set to  0.000000
5/27/2010	6:53:05 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	6:53:06 PM	Tube furnace set to 0
5/27/2010	6:53:06 PM	Run finished at 6:53 PM
5/27/2010	6:53:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	7:29:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/27/2010	7:29:05 PM	Recipe started at 7:29 PM
5/27/2010	7:29:05 PM	H2 valve closed
5/27/2010	7:29:05 PM	BCl3 valve closed
5/27/2010	7:29:05 PM	PH3 valve closed
5/27/2010	7:29:05 PM	SiCl4 pre valve closed
5/27/2010	7:29:05 PM	SiCl4 post valve closed
5/27/2010	7:29:05 PM	Main Vac valve closed
5/27/2010	7:29:05 PM	Bypass valve closed
5/27/2010	7:29:05 PM	Bubbler valve closed
5/27/2010	7:29:05 PM	Helium valve opened
5/27/2010	7:29:05 PM	Helium MFC set to  500.000000
5/27/2010	7:29:05 PM	H2 MFC set to  0.000000
5/27/2010	7:29:05 PM	BCl3 MFC set to  0.000000
5/27/2010	7:29:05 PM	PHl3 MFC set to  0.000000
5/27/2010	7:29:05 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:29:05 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:29:05 PM	Tube furnace set to 0
5/27/2010	7:30:25 PM	Helium valve closed
5/27/2010	7:30:25 PM	H2 valve closed
5/27/2010	7:30:25 PM	BCl3 valve closed
5/27/2010	7:30:25 PM	PH3 valve closed
5/27/2010	7:30:25 PM	SiCl4 pre valve closed
5/27/2010	7:30:25 PM	SiCl4 post valve closed
5/27/2010	7:30:25 PM	Main Vac valve closed
5/27/2010	7:30:25 PM	Bypass valve closed
5/27/2010	7:30:25 PM	Bubbler valve closed
5/27/2010	7:30:25 PM	Helium MFC set to  0.000000
5/27/2010	7:30:25 PM	H2 MFC set to  0.000000
5/27/2010	7:30:25 PM	BCl3 MFC set to  0.000000
5/27/2010	7:30:25 PM	PHl3 MFC set to  0.000000
5/27/2010	7:30:25 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:30:25 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:30:25 PM	Tube furnace set to 0
5/27/2010	7:30:25 PM	Run finished at 7:30 PM
5/27/2010	7:30:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/27/2010	7:32:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	7:32:27 PM	Recipe started at 7:32 PM
5/27/2010	7:32:27 PM	Helium valve closed
5/27/2010	7:32:27 PM	H2 valve closed
5/27/2010	7:32:27 PM	BCl3 valve closed
5/27/2010	7:32:27 PM	PH3 valve closed
5/27/2010	7:32:27 PM	SiCl4 pre valve closed
5/27/2010	7:32:27 PM	SiCl4 post valve closed
5/27/2010	7:32:27 PM	Main Vac valve closed
5/27/2010	7:32:27 PM	Bubbler valve closed
5/27/2010	7:32:27 PM	Bypass valve opened
5/27/2010	7:32:27 PM	Helium MFC set to  0.000000
5/27/2010	7:32:27 PM	H2 MFC set to  0.000000
5/27/2010	7:32:27 PM	BCl3 MFC set to  0.000000
5/27/2010	7:32:27 PM	PHl3 MFC set to  0.000000
5/27/2010	7:32:27 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:32:27 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:32:27 PM	Tube furnace set to 0
5/27/2010	7:33:13 PM	Helium valve closed
5/27/2010	7:33:13 PM	H2 valve closed
5/27/2010	7:33:13 PM	BCl3 valve closed
5/27/2010	7:33:13 PM	PH3 valve closed
5/27/2010	7:33:13 PM	SiCl4 pre valve closed
5/27/2010	7:33:13 PM	SiCl4 post valve closed
5/27/2010	7:33:13 PM	Bubbler valve closed
5/27/2010	7:33:13 PM	Main Vac valve opened
5/27/2010	7:33:13 PM	Bypass valve opened
5/27/2010	7:33:13 PM	Helium MFC set to  0.000000
5/27/2010	7:33:13 PM	H2 MFC set to  0.000000
5/27/2010	7:33:13 PM	BCl3 MFC set to  0.000000
5/27/2010	7:33:13 PM	PHl3 MFC set to  0.000000
5/27/2010	7:33:13 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:33:13 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:33:13 PM	Tube furnace set to 0
5/27/2010	7:33:13 PM	Run finished at 7:33 PM
5/27/2010	7:33:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	7:35:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/27/2010	7:35:50 PM	Recipe started at 7:35 PM
5/27/2010	7:35:50 PM	H2 valve closed
5/27/2010	7:35:50 PM	BCl3 valve closed
5/27/2010	7:35:50 PM	PH3 valve closed
5/27/2010	7:35:50 PM	SiCl4 pre valve closed
5/27/2010	7:35:50 PM	SiCl4 post valve closed
5/27/2010	7:35:50 PM	Main Vac valve closed
5/27/2010	7:35:50 PM	Bypass valve closed
5/27/2010	7:35:50 PM	Bubbler valve closed
5/27/2010	7:35:50 PM	Helium valve opened
5/27/2010	7:35:50 PM	Helium MFC set to  500.000000
5/27/2010	7:35:50 PM	H2 MFC set to  0.000000
5/27/2010	7:35:50 PM	BCl3 MFC set to  0.000000
5/27/2010	7:35:50 PM	PHl3 MFC set to  0.000000
5/27/2010	7:35:50 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:35:50 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:35:50 PM	Tube furnace set to 0
5/27/2010	7:37:12 PM	Helium valve closed
5/27/2010	7:37:12 PM	H2 valve closed
5/27/2010	7:37:12 PM	BCl3 valve closed
5/27/2010	7:37:12 PM	PH3 valve closed
5/27/2010	7:37:12 PM	SiCl4 pre valve closed
5/27/2010	7:37:12 PM	SiCl4 post valve closed
5/27/2010	7:37:12 PM	Main Vac valve closed
5/27/2010	7:37:12 PM	Bypass valve closed
5/27/2010	7:37:12 PM	Bubbler valve closed
5/27/2010	7:37:12 PM	Helium MFC set to  0.000000
5/27/2010	7:37:12 PM	H2 MFC set to  0.000000
5/27/2010	7:37:12 PM	BCl3 MFC set to  0.000000
5/27/2010	7:37:12 PM	PHl3 MFC set to  0.000000
5/27/2010	7:37:12 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:37:12 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:37:12 PM	Tube furnace set to 0
5/27/2010	7:37:27 PM	Helium valve closed
5/27/2010	7:37:27 PM	H2 valve closed
5/27/2010	7:37:27 PM	BCl3 valve closed
5/27/2010	7:37:27 PM	PH3 valve closed
5/27/2010	7:37:27 PM	SiCl4 pre valve closed
5/27/2010	7:37:27 PM	SiCl4 post valve closed
5/27/2010	7:37:27 PM	Main Vac valve closed
5/27/2010	7:37:27 PM	Bubbler valve closed
5/27/2010	7:37:27 PM	Bypass valve opened
5/27/2010	7:37:27 PM	Helium MFC set to  0.000000
5/27/2010	7:37:27 PM	H2 MFC set to  0.000000
5/27/2010	7:37:27 PM	BCl3 MFC set to  0.000000
5/27/2010	7:37:27 PM	PHl3 MFC set to  0.000000
5/27/2010	7:37:27 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:37:27 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:37:27 PM	Tube furnace set to 0
5/27/2010	7:38:01 PM	Helium valve closed
5/27/2010	7:38:01 PM	H2 valve closed
5/27/2010	7:38:01 PM	BCl3 valve closed
5/27/2010	7:38:01 PM	PH3 valve closed
5/27/2010	7:38:01 PM	SiCl4 pre valve closed
5/27/2010	7:38:01 PM	SiCl4 post valve closed
5/27/2010	7:38:01 PM	Bubbler valve closed
5/27/2010	7:38:01 PM	Main Vac valve opened
5/27/2010	7:38:01 PM	Bypass valve opened
5/27/2010	7:38:01 PM	Helium MFC set to  0.000000
5/27/2010	7:38:01 PM	H2 MFC set to  0.000000
5/27/2010	7:38:01 PM	BCl3 MFC set to  0.000000
5/27/2010	7:38:01 PM	PHl3 MFC set to  0.000000
5/27/2010	7:38:01 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:38:01 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:38:01 PM	Tube furnace set to 0
5/27/2010	7:43:01 PM	H2 valve closed
5/27/2010	7:43:01 PM	BCl3 valve closed
5/27/2010	7:43:01 PM	PH3 valve closed
5/27/2010	7:43:01 PM	SiCl4 pre valve closed
5/27/2010	7:43:01 PM	SiCl4 post valve closed
5/27/2010	7:43:01 PM	Main Vac valve closed
5/27/2010	7:43:01 PM	Bypass valve closed
5/27/2010	7:43:01 PM	Bubbler valve closed
5/27/2010	7:43:01 PM	Helium valve opened
5/27/2010	7:43:01 PM	Helium MFC set to  500.000000
5/27/2010	7:43:01 PM	H2 MFC set to  0.000000
5/27/2010	7:43:01 PM	BCl3 MFC set to  0.000000
5/27/2010	7:43:01 PM	PHl3 MFC set to  0.000000
5/27/2010	7:43:01 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:43:01 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:43:01 PM	Tube furnace set to 0
5/27/2010	7:44:23 PM	Helium valve closed
5/27/2010	7:44:23 PM	H2 valve closed
5/27/2010	7:44:23 PM	BCl3 valve closed
5/27/2010	7:44:23 PM	PH3 valve closed
5/27/2010	7:44:23 PM	SiCl4 pre valve closed
5/27/2010	7:44:23 PM	SiCl4 post valve closed
5/27/2010	7:44:23 PM	Main Vac valve closed
5/27/2010	7:44:23 PM	Bypass valve closed
5/27/2010	7:44:23 PM	Bubbler valve closed
5/27/2010	7:44:23 PM	Helium MFC set to  0.000000
5/27/2010	7:44:23 PM	H2 MFC set to  0.000000
5/27/2010	7:44:23 PM	BCl3 MFC set to  0.000000
5/27/2010	7:44:23 PM	PHl3 MFC set to  0.000000
5/27/2010	7:44:23 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:44:23 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:44:23 PM	Tube furnace set to 0
5/27/2010	7:44:38 PM	Helium valve closed
5/27/2010	7:44:38 PM	H2 valve closed
5/27/2010	7:44:38 PM	BCl3 valve closed
5/27/2010	7:44:38 PM	PH3 valve closed
5/27/2010	7:44:38 PM	SiCl4 pre valve closed
5/27/2010	7:44:38 PM	SiCl4 post valve closed
5/27/2010	7:44:38 PM	Main Vac valve closed
5/27/2010	7:44:38 PM	Bubbler valve closed
5/27/2010	7:44:38 PM	Bypass valve opened
5/27/2010	7:44:38 PM	Helium MFC set to  0.000000
5/27/2010	7:44:38 PM	H2 MFC set to  0.000000
5/27/2010	7:44:38 PM	BCl3 MFC set to  0.000000
5/27/2010	7:44:38 PM	PHl3 MFC set to  0.000000
5/27/2010	7:44:38 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:44:38 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:44:38 PM	Tube furnace set to 0
5/27/2010	7:45:11 PM	Helium valve closed
5/27/2010	7:45:11 PM	H2 valve closed
5/27/2010	7:45:11 PM	BCl3 valve closed
5/27/2010	7:45:11 PM	PH3 valve closed
5/27/2010	7:45:11 PM	SiCl4 pre valve closed
5/27/2010	7:45:11 PM	SiCl4 post valve closed
5/27/2010	7:45:11 PM	Bubbler valve closed
5/27/2010	7:45:11 PM	Main Vac valve opened
5/27/2010	7:45:11 PM	Bypass valve opened
5/27/2010	7:45:11 PM	Helium MFC set to  0.000000
5/27/2010	7:45:11 PM	H2 MFC set to  0.000000
5/27/2010	7:45:11 PM	BCl3 MFC set to  0.000000
5/27/2010	7:45:11 PM	PHl3 MFC set to  0.000000
5/27/2010	7:45:11 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:45:11 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:45:11 PM	Tube furnace set to 0
5/27/2010	7:50:11 PM	H2 valve closed
5/27/2010	7:50:11 PM	BCl3 valve closed
5/27/2010	7:50:11 PM	PH3 valve closed
5/27/2010	7:50:11 PM	SiCl4 pre valve closed
5/27/2010	7:50:11 PM	SiCl4 post valve closed
5/27/2010	7:50:11 PM	Main Vac valve closed
5/27/2010	7:50:11 PM	Bypass valve closed
5/27/2010	7:50:11 PM	Bubbler valve closed
5/27/2010	7:50:11 PM	Helium valve opened
5/27/2010	7:50:11 PM	Helium MFC set to  500.000000
5/27/2010	7:50:11 PM	H2 MFC set to  0.000000
5/27/2010	7:50:11 PM	BCl3 MFC set to  0.000000
5/27/2010	7:50:11 PM	PHl3 MFC set to  0.000000
5/27/2010	7:50:11 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:50:11 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:50:11 PM	Tube furnace set to 0
5/27/2010	7:51:33 PM	Helium valve closed
5/27/2010	7:51:33 PM	H2 valve closed
5/27/2010	7:51:33 PM	BCl3 valve closed
5/27/2010	7:51:33 PM	PH3 valve closed
5/27/2010	7:51:33 PM	SiCl4 pre valve closed
5/27/2010	7:51:33 PM	SiCl4 post valve closed
5/27/2010	7:51:33 PM	Main Vac valve closed
5/27/2010	7:51:33 PM	Bypass valve closed
5/27/2010	7:51:33 PM	Bubbler valve closed
5/27/2010	7:51:33 PM	Helium MFC set to  0.000000
5/27/2010	7:51:33 PM	H2 MFC set to  0.000000
5/27/2010	7:51:33 PM	BCl3 MFC set to  0.000000
5/27/2010	7:51:33 PM	PHl3 MFC set to  0.000000
5/27/2010	7:51:33 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:51:33 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:51:33 PM	Tube furnace set to 0
5/27/2010	7:51:48 PM	Helium valve closed
5/27/2010	7:51:48 PM	H2 valve closed
5/27/2010	7:51:48 PM	BCl3 valve closed
5/27/2010	7:51:48 PM	PH3 valve closed
5/27/2010	7:51:48 PM	SiCl4 pre valve closed
5/27/2010	7:51:48 PM	SiCl4 post valve closed
5/27/2010	7:51:48 PM	Main Vac valve closed
5/27/2010	7:51:48 PM	Bubbler valve closed
5/27/2010	7:51:48 PM	Bypass valve opened
5/27/2010	7:51:48 PM	Helium MFC set to  0.000000
5/27/2010	7:51:48 PM	H2 MFC set to  0.000000
5/27/2010	7:51:48 PM	BCl3 MFC set to  0.000000
5/27/2010	7:51:48 PM	PHl3 MFC set to  0.000000
5/27/2010	7:51:48 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:51:48 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:51:49 PM	Tube furnace set to 0
5/27/2010	7:52:22 PM	Helium valve closed
5/27/2010	7:52:22 PM	H2 valve closed
5/27/2010	7:52:22 PM	BCl3 valve closed
5/27/2010	7:52:22 PM	PH3 valve closed
5/27/2010	7:52:22 PM	SiCl4 pre valve closed
5/27/2010	7:52:22 PM	SiCl4 post valve closed
5/27/2010	7:52:22 PM	Bubbler valve closed
5/27/2010	7:52:22 PM	Main Vac valve opened
5/27/2010	7:52:22 PM	Bypass valve opened
5/27/2010	7:52:22 PM	Helium MFC set to  0.000000
5/27/2010	7:52:22 PM	H2 MFC set to  0.000000
5/27/2010	7:52:22 PM	BCl3 MFC set to  0.000000
5/27/2010	7:52:22 PM	PHl3 MFC set to  0.000000
5/27/2010	7:52:22 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:52:22 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:52:22 PM	Tube furnace set to 0
5/27/2010	7:57:22 PM	Helium valve closed
5/27/2010	7:57:22 PM	H2 valve closed
5/27/2010	7:57:22 PM	BCl3 valve closed
5/27/2010	7:57:22 PM	PH3 valve closed
5/27/2010	7:57:22 PM	SiCl4 pre valve closed
5/27/2010	7:57:22 PM	SiCl4 post valve closed
5/27/2010	7:57:22 PM	Bubbler valve closed
5/27/2010	7:57:22 PM	Main Vac valve opened
5/27/2010	7:57:22 PM	Bypass valve opened
5/27/2010	7:57:22 PM	Helium MFC set to  0.000000
5/27/2010	7:57:22 PM	H2 MFC set to  0.000000
5/27/2010	7:57:22 PM	BCl3 MFC set to  0.000000
5/27/2010	7:57:22 PM	PHl3 MFC set to  0.000000
5/27/2010	7:57:22 PM	SiCl4 MFC set to  0.000000
5/27/2010	7:57:22 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	7:57:22 PM	Tube furnace set to 0
5/27/2010	7:57:23 PM	Run finished at 7:57 PM
5/27/2010	7:57:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/27/2010	8:23:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/27/2010	8:23:15 PM	Recipe started at 8:23 PM
5/27/2010	8:23:15 PM	H2 valve closed
5/27/2010	8:23:15 PM	BCl3 valve closed
5/27/2010	8:23:15 PM	PH3 valve closed
5/27/2010	8:23:15 PM	SiCl4 pre valve closed
5/27/2010	8:23:15 PM	SiCl4 post valve closed
5/27/2010	8:23:15 PM	Main Vac valve closed
5/27/2010	8:23:15 PM	Bypass valve closed
5/27/2010	8:23:15 PM	Bubbler valve closed
5/27/2010	8:23:15 PM	Helium valve opened
5/27/2010	8:23:15 PM	Helium MFC set to  500.000000
5/27/2010	8:23:15 PM	H2 MFC set to  0.000000
5/27/2010	8:23:15 PM	BCl3 MFC set to  0.000000
5/27/2010	8:23:15 PM	PHl3 MFC set to  0.000000
5/27/2010	8:23:15 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:23:15 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:23:15 PM	Tube furnace set to 0
5/27/2010	8:24:37 PM	Helium valve closed
5/27/2010	8:24:37 PM	H2 valve closed
5/27/2010	8:24:37 PM	BCl3 valve closed
5/27/2010	8:24:37 PM	PH3 valve closed
5/27/2010	8:24:37 PM	SiCl4 pre valve closed
5/27/2010	8:24:37 PM	SiCl4 post valve closed
5/27/2010	8:24:37 PM	Main Vac valve closed
5/27/2010	8:24:37 PM	Bypass valve closed
5/27/2010	8:24:37 PM	Bubbler valve closed
5/27/2010	8:24:37 PM	Helium MFC set to  0.000000
5/27/2010	8:24:37 PM	H2 MFC set to  0.000000
5/27/2010	8:24:37 PM	BCl3 MFC set to  0.000000
5/27/2010	8:24:37 PM	PHl3 MFC set to  0.000000
5/27/2010	8:24:37 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:24:37 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:24:37 PM	Tube furnace set to 0
5/27/2010	8:24:52 PM	Helium valve closed
5/27/2010	8:24:52 PM	H2 valve closed
5/27/2010	8:24:52 PM	BCl3 valve closed
5/27/2010	8:24:52 PM	PH3 valve closed
5/27/2010	8:24:52 PM	SiCl4 pre valve closed
5/27/2010	8:24:52 PM	SiCl4 post valve closed
5/27/2010	8:24:52 PM	Main Vac valve closed
5/27/2010	8:24:52 PM	Bubbler valve closed
5/27/2010	8:24:52 PM	Bypass valve opened
5/27/2010	8:24:52 PM	Helium MFC set to  0.000000
5/27/2010	8:24:52 PM	H2 MFC set to  0.000000
5/27/2010	8:24:52 PM	BCl3 MFC set to  0.000000
5/27/2010	8:24:52 PM	PHl3 MFC set to  0.000000
5/27/2010	8:24:52 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:24:52 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:24:52 PM	Tube furnace set to 0
5/27/2010	8:25:25 PM	Helium valve closed
5/27/2010	8:25:25 PM	H2 valve closed
5/27/2010	8:25:25 PM	BCl3 valve closed
5/27/2010	8:25:25 PM	PH3 valve closed
5/27/2010	8:25:25 PM	SiCl4 pre valve closed
5/27/2010	8:25:25 PM	SiCl4 post valve closed
5/27/2010	8:25:25 PM	Bubbler valve closed
5/27/2010	8:25:26 PM	Main Vac valve opened
5/27/2010	8:25:26 PM	Bypass valve opened
5/27/2010	8:25:26 PM	Helium MFC set to  0.000000
5/27/2010	8:25:26 PM	H2 MFC set to  0.000000
5/27/2010	8:25:26 PM	BCl3 MFC set to  0.000000
5/27/2010	8:25:26 PM	PHl3 MFC set to  0.000000
5/27/2010	8:25:26 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:25:26 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:25:26 PM	Tube furnace set to 0
5/27/2010	8:30:26 PM	H2 valve closed
5/27/2010	8:30:26 PM	BCl3 valve closed
5/27/2010	8:30:26 PM	PH3 valve closed
5/27/2010	8:30:26 PM	SiCl4 pre valve closed
5/27/2010	8:30:26 PM	SiCl4 post valve closed
5/27/2010	8:30:26 PM	Main Vac valve closed
5/27/2010	8:30:26 PM	Bypass valve closed
5/27/2010	8:30:26 PM	Bubbler valve closed
5/27/2010	8:30:26 PM	Helium valve opened
5/27/2010	8:30:26 PM	Helium MFC set to  500.000000
5/27/2010	8:30:26 PM	H2 MFC set to  0.000000
5/27/2010	8:30:26 PM	BCl3 MFC set to  0.000000
5/27/2010	8:30:26 PM	PHl3 MFC set to  0.000000
5/27/2010	8:30:26 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:30:26 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:30:26 PM	Tube furnace set to 0
5/27/2010	8:31:48 PM	Helium valve closed
5/27/2010	8:31:48 PM	H2 valve closed
5/27/2010	8:31:48 PM	BCl3 valve closed
5/27/2010	8:31:48 PM	PH3 valve closed
5/27/2010	8:31:48 PM	SiCl4 pre valve closed
5/27/2010	8:31:48 PM	SiCl4 post valve closed
5/27/2010	8:31:48 PM	Main Vac valve closed
5/27/2010	8:31:48 PM	Bypass valve closed
5/27/2010	8:31:48 PM	Bubbler valve closed
5/27/2010	8:31:48 PM	Helium MFC set to  0.000000
5/27/2010	8:31:48 PM	H2 MFC set to  0.000000
5/27/2010	8:31:48 PM	BCl3 MFC set to  0.000000
5/27/2010	8:31:48 PM	PHl3 MFC set to  0.000000
5/27/2010	8:31:48 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:31:48 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:31:48 PM	Tube furnace set to 0
5/27/2010	8:32:03 PM	Helium valve closed
5/27/2010	8:32:03 PM	H2 valve closed
5/27/2010	8:32:03 PM	BCl3 valve closed
5/27/2010	8:32:03 PM	PH3 valve closed
5/27/2010	8:32:03 PM	SiCl4 pre valve closed
5/27/2010	8:32:03 PM	SiCl4 post valve closed
5/27/2010	8:32:03 PM	Main Vac valve closed
5/27/2010	8:32:03 PM	Bubbler valve closed
5/27/2010	8:32:03 PM	Bypass valve opened
5/27/2010	8:32:03 PM	Helium MFC set to  0.000000
5/27/2010	8:32:03 PM	H2 MFC set to  0.000000
5/27/2010	8:32:03 PM	BCl3 MFC set to  0.000000
5/27/2010	8:32:03 PM	PHl3 MFC set to  0.000000
5/27/2010	8:32:03 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:32:03 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:32:03 PM	Tube furnace set to 0
5/27/2010	8:32:36 PM	Helium valve closed
5/27/2010	8:32:36 PM	H2 valve closed
5/27/2010	8:32:36 PM	BCl3 valve closed
5/27/2010	8:32:36 PM	PH3 valve closed
5/27/2010	8:32:36 PM	SiCl4 pre valve closed
5/27/2010	8:32:36 PM	SiCl4 post valve closed
5/27/2010	8:32:36 PM	Bubbler valve closed
5/27/2010	8:32:36 PM	Main Vac valve opened
5/27/2010	8:32:36 PM	Bypass valve opened
5/27/2010	8:32:36 PM	Helium MFC set to  0.000000
5/27/2010	8:32:36 PM	H2 MFC set to  0.000000
5/27/2010	8:32:36 PM	BCl3 MFC set to  0.000000
5/27/2010	8:32:36 PM	PHl3 MFC set to  0.000000
5/27/2010	8:32:36 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:32:36 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:32:36 PM	Tube furnace set to 0
5/27/2010	8:37:36 PM	H2 valve closed
5/27/2010	8:37:36 PM	BCl3 valve closed
5/27/2010	8:37:36 PM	PH3 valve closed
5/27/2010	8:37:36 PM	SiCl4 pre valve closed
5/27/2010	8:37:36 PM	SiCl4 post valve closed
5/27/2010	8:37:36 PM	Main Vac valve closed
5/27/2010	8:37:36 PM	Bypass valve closed
5/27/2010	8:37:36 PM	Bubbler valve closed
5/27/2010	8:37:36 PM	Helium valve opened
5/27/2010	8:37:36 PM	Helium MFC set to  500.000000
5/27/2010	8:37:36 PM	H2 MFC set to  0.000000
5/27/2010	8:37:36 PM	BCl3 MFC set to  0.000000
5/27/2010	8:37:36 PM	PHl3 MFC set to  0.000000
5/27/2010	8:37:36 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:37:36 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:37:36 PM	Tube furnace set to 0
5/27/2010	8:38:58 PM	Helium valve closed
5/27/2010	8:38:58 PM	H2 valve closed
5/27/2010	8:38:58 PM	BCl3 valve closed
5/27/2010	8:38:58 PM	PH3 valve closed
5/27/2010	8:38:58 PM	SiCl4 pre valve closed
5/27/2010	8:38:58 PM	SiCl4 post valve closed
5/27/2010	8:38:58 PM	Main Vac valve closed
5/27/2010	8:38:58 PM	Bypass valve closed
5/27/2010	8:38:58 PM	Bubbler valve closed
5/27/2010	8:38:58 PM	Helium MFC set to  0.000000
5/27/2010	8:38:58 PM	H2 MFC set to  0.000000
5/27/2010	8:38:58 PM	BCl3 MFC set to  0.000000
5/27/2010	8:38:58 PM	PHl3 MFC set to  0.000000
5/27/2010	8:38:58 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:38:58 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:38:58 PM	Tube furnace set to 0
5/27/2010	8:39:13 PM	Helium valve closed
5/27/2010	8:39:13 PM	H2 valve closed
5/27/2010	8:39:13 PM	BCl3 valve closed
5/27/2010	8:39:13 PM	PH3 valve closed
5/27/2010	8:39:13 PM	SiCl4 pre valve closed
5/27/2010	8:39:13 PM	SiCl4 post valve closed
5/27/2010	8:39:13 PM	Main Vac valve closed
5/27/2010	8:39:13 PM	Bubbler valve closed
5/27/2010	8:39:13 PM	Bypass valve opened
5/27/2010	8:39:13 PM	Helium MFC set to  0.000000
5/27/2010	8:39:13 PM	H2 MFC set to  0.000000
5/27/2010	8:39:13 PM	BCl3 MFC set to  0.000000
5/27/2010	8:39:13 PM	PHl3 MFC set to  0.000000
5/27/2010	8:39:13 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:39:13 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:39:13 PM	Tube furnace set to 0
5/27/2010	8:39:46 PM	Helium valve closed
5/27/2010	8:39:46 PM	H2 valve closed
5/27/2010	8:39:46 PM	BCl3 valve closed
5/27/2010	8:39:46 PM	PH3 valve closed
5/27/2010	8:39:46 PM	SiCl4 pre valve closed
5/27/2010	8:39:46 PM	SiCl4 post valve closed
5/27/2010	8:39:46 PM	Bubbler valve closed
5/27/2010	8:39:46 PM	Main Vac valve opened
5/27/2010	8:39:46 PM	Bypass valve opened
5/27/2010	8:39:46 PM	Helium MFC set to  0.000000
5/27/2010	8:39:46 PM	H2 MFC set to  0.000000
5/27/2010	8:39:46 PM	BCl3 MFC set to  0.000000
5/27/2010	8:39:46 PM	PHl3 MFC set to  0.000000
5/27/2010	8:39:46 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:39:46 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:39:46 PM	Tube furnace set to 0
5/27/2010	8:44:46 PM	Helium valve closed
5/27/2010	8:44:46 PM	H2 valve closed
5/27/2010	8:44:46 PM	BCl3 valve closed
5/27/2010	8:44:46 PM	PH3 valve closed
5/27/2010	8:44:46 PM	SiCl4 pre valve closed
5/27/2010	8:44:46 PM	SiCl4 post valve closed
5/27/2010	8:44:46 PM	Bubbler valve closed
5/27/2010	8:44:46 PM	Main Vac valve opened
5/27/2010	8:44:46 PM	Bypass valve opened
5/27/2010	8:44:46 PM	Helium MFC set to  0.000000
5/27/2010	8:44:46 PM	H2 MFC set to  0.000000
5/27/2010	8:44:46 PM	BCl3 MFC set to  0.000000
5/27/2010	8:44:46 PM	PHl3 MFC set to  0.000000
5/27/2010	8:44:46 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:44:46 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:44:46 PM	Tube furnace set to 0
5/27/2010	8:44:47 PM	Run finished at 8:44 PM
5/27/2010	8:44:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/27/2010	8:52:59 PM	Bypass valve closed
5/27/2010	8:52:59 PM	Main Vac valve closed
5/27/2010	8:53:04 PM	Tube furnace set to 100
5/27/2010	8:53:11 PM	Bypass valve opened
5/27/2010	8:53:12 PM	Main Vac valve opened
5/27/2010	8:54:28 PM	Tube furnace set to 0
5/27/2010	8:54:40 PM	Recipe started at 8:54 PM
5/27/2010	8:54:40 PM	Helium valve closed
5/27/2010	8:54:40 PM	BCl3 valve closed
5/27/2010	8:54:40 PM	PH3 valve closed
5/27/2010	8:54:40 PM	SiCl4 pre valve closed
5/27/2010	8:54:40 PM	SiCl4 post valve closed
5/27/2010	8:54:40 PM	Main Vac valve closed
5/27/2010	8:54:40 PM	Bypass valve closed
5/27/2010	8:54:40 PM	Bubbler valve closed
5/27/2010	8:54:40 PM	H2 valve opened
5/27/2010	8:54:40 PM	Helium MFC set to  0.000000
5/27/2010	8:54:40 PM	H2 MFC set to  500.000000
5/27/2010	8:54:40 PM	BCl3 MFC set to  0.000000
5/27/2010	8:54:40 PM	PHl3 MFC set to  0.000000
5/27/2010	8:54:40 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:54:40 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:54:40 PM	Tube furnace set to 0
5/27/2010	8:56:02 PM	Helium valve closed
5/27/2010	8:56:02 PM	BCl3 valve closed
5/27/2010	8:56:02 PM	PH3 valve closed
5/27/2010	8:56:02 PM	SiCl4 pre valve closed
5/27/2010	8:56:02 PM	SiCl4 post valve closed
5/27/2010	8:56:02 PM	Main Vac valve closed
5/27/2010	8:56:02 PM	Bypass valve closed
5/27/2010	8:56:02 PM	H2 valve opened
5/27/2010	8:56:02 PM	Bubbler valve opened
5/27/2010	8:56:02 PM	Helium MFC set to  0.000000
5/27/2010	8:56:02 PM	H2 MFC set to  500.000000
5/27/2010	8:56:02 PM	BCl3 MFC set to  0.000000
5/27/2010	8:56:02 PM	PHl3 MFC set to  0.000000
5/27/2010	8:56:02 PM	SiCl4 MFC set to  0.000000
5/27/2010	8:56:02 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	8:56:02 PM	Tube furnace set to 1000
5/27/2010	9:04:55 PM	Helium valve closed
5/27/2010	9:04:55 PM	PH3 valve closed
5/27/2010	9:04:55 PM	Main Vac valve closed
5/27/2010	9:04:55 PM	Bypass valve closed
5/27/2010	9:04:55 PM	H2 valve opened
5/27/2010	9:04:55 PM	BCl3 valve opened
5/27/2010	9:04:55 PM	SiCl4 pre valve opened
5/27/2010	9:04:55 PM	SiCl4 post valve opened
5/27/2010	9:04:55 PM	Bubbler valve opened
5/27/2010	9:04:55 PM	Helium MFC set to  0.000000
5/27/2010	9:04:55 PM	H2 MFC set to  500.000000
5/27/2010	9:04:55 PM	BCl3 MFC set to  35.000000
5/27/2010	9:04:55 PM	PHl3 MFC set to  0.000000
5/27/2010	9:04:55 PM	SiCl4 MFC set to  50.000000
5/27/2010	9:04:55 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:04:55 PM	Tube furnace set to 1000
5/27/2010	9:08:14 PM	Helium valve closed
5/27/2010	9:08:14 PM	PH3 valve closed
5/27/2010	9:08:14 PM	Main Vac valve closed
5/27/2010	9:08:14 PM	Bypass valve closed
5/27/2010	9:08:14 PM	H2 valve opened
5/27/2010	9:08:14 PM	BCl3 valve opened
5/27/2010	9:08:14 PM	SiCl4 pre valve opened
5/27/2010	9:08:14 PM	SiCl4 post valve opened
5/27/2010	9:08:14 PM	Bubbler valve opened
5/27/2010	9:08:14 PM	Helium MFC set to  0.000000
5/27/2010	9:08:14 PM	H2 MFC set to  500.000000
5/27/2010	9:08:14 PM	BCl3 MFC set to  35.000000
5/27/2010	9:08:14 PM	PHl3 MFC set to  0.000000
5/27/2010	9:08:14 PM	SiCl4 MFC set to  50.000000
5/27/2010	9:08:14 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:08:14 PM	Tube furnace set to 1000
5/27/2010	9:13:14 PM	H2 valve closed
5/27/2010	9:13:14 PM	BCl3 valve closed
5/27/2010	9:13:14 PM	PH3 valve closed
5/27/2010	9:13:14 PM	SiCl4 pre valve closed
5/27/2010	9:13:14 PM	SiCl4 post valve closed
5/27/2010	9:13:14 PM	Main Vac valve closed
5/27/2010	9:13:14 PM	Bypass valve closed
5/27/2010	9:13:14 PM	Helium valve opened
5/27/2010	9:13:14 PM	Bubbler valve opened
5/27/2010	9:13:14 PM	Helium MFC set to  500.000000
5/27/2010	9:13:14 PM	H2 MFC set to  0.000000
5/27/2010	9:13:14 PM	BCl3 MFC set to  0.000000
5/27/2010	9:13:14 PM	PHl3 MFC set to  0.000000
5/27/2010	9:13:14 PM	SiCl4 MFC set to  0.000000
5/27/2010	9:13:14 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:13:14 PM	Tube furnace set to 0
5/27/2010	9:33:14 PM	Helium valve closed
5/27/2010	9:33:14 PM	H2 valve closed
5/27/2010	9:33:14 PM	BCl3 valve closed
5/27/2010	9:33:14 PM	PH3 valve closed
5/27/2010	9:33:14 PM	SiCl4 pre valve closed
5/27/2010	9:33:14 PM	SiCl4 post valve closed
5/27/2010	9:33:14 PM	Main Vac valve closed
5/27/2010	9:33:14 PM	Bypass valve closed
5/27/2010	9:33:14 PM	Bubbler valve closed
5/27/2010	9:33:14 PM	Helium MFC set to  0.000000
5/27/2010	9:33:14 PM	H2 MFC set to  0.000000
5/27/2010	9:33:14 PM	BCl3 MFC set to  0.000000
5/27/2010	9:33:14 PM	PHl3 MFC set to  0.000000
5/27/2010	9:33:14 PM	SiCl4 MFC set to  0.000000
5/27/2010	9:33:14 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:33:14 PM	Tube furnace set to 0
5/27/2010	9:33:15 PM	Run finished at 9:33 PM
5/27/2010	9:57:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	9:57:40 PM	Recipe started at 9:57 PM
5/27/2010	9:57:40 PM	Helium valve closed
5/27/2010	9:57:40 PM	H2 valve closed
5/27/2010	9:57:40 PM	BCl3 valve closed
5/27/2010	9:57:40 PM	PH3 valve closed
5/27/2010	9:57:40 PM	SiCl4 pre valve closed
5/27/2010	9:57:40 PM	SiCl4 post valve closed
5/27/2010	9:57:40 PM	Main Vac valve closed
5/27/2010	9:57:40 PM	Bubbler valve closed
5/27/2010	9:57:40 PM	Bypass valve opened
5/27/2010	9:57:40 PM	Helium MFC set to  0.000000
5/27/2010	9:57:40 PM	H2 MFC set to  0.000000
5/27/2010	9:57:40 PM	BCl3 MFC set to  0.000000
5/27/2010	9:57:40 PM	PHl3 MFC set to  0.000000
5/27/2010	9:57:40 PM	SiCl4 MFC set to  0.000000
5/27/2010	9:57:40 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:57:40 PM	Tube furnace set to 0
5/27/2010	9:58:28 PM	Helium valve closed
5/27/2010	9:58:28 PM	H2 valve closed
5/27/2010	9:58:28 PM	BCl3 valve closed
5/27/2010	9:58:28 PM	PH3 valve closed
5/27/2010	9:58:28 PM	SiCl4 pre valve closed
5/27/2010	9:58:28 PM	SiCl4 post valve closed
5/27/2010	9:58:28 PM	Bubbler valve closed
5/27/2010	9:58:28 PM	Main Vac valve opened
5/27/2010	9:58:28 PM	Bypass valve opened
5/27/2010	9:58:28 PM	Helium MFC set to  0.000000
5/27/2010	9:58:28 PM	H2 MFC set to  0.000000
5/27/2010	9:58:28 PM	BCl3 MFC set to  0.000000
5/27/2010	9:58:28 PM	PHl3 MFC set to  0.000000
5/27/2010	9:58:28 PM	SiCl4 MFC set to  0.000000
5/27/2010	9:58:28 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	9:58:28 PM	Tube furnace set to 0
5/27/2010	9:58:28 PM	Run finished at 9:58 PM
5/27/2010	9:58:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	11:43:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/27/2010	11:44:00 PM	Recipe started at 11:43 PM
5/27/2010	11:44:00 PM	H2 valve closed
5/27/2010	11:44:00 PM	BCl3 valve closed
5/27/2010	11:44:00 PM	PH3 valve closed
5/27/2010	11:44:00 PM	SiCl4 pre valve closed
5/27/2010	11:44:00 PM	SiCl4 post valve closed
5/27/2010	11:44:00 PM	Main Vac valve closed
5/27/2010	11:44:00 PM	Bypass valve closed
5/27/2010	11:44:00 PM	Bubbler valve closed
5/27/2010	11:44:00 PM	Helium valve opened
5/27/2010	11:44:00 PM	Helium MFC set to  500.000000
5/27/2010	11:44:00 PM	H2 MFC set to  0.000000
5/27/2010	11:44:00 PM	BCl3 MFC set to  0.000000
5/27/2010	11:44:00 PM	PHl3 MFC set to  0.000000
5/27/2010	11:44:00 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:44:00 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	11:44:00 PM	Tube furnace set to 0
5/27/2010	11:45:18 PM	Helium valve closed
5/27/2010	11:45:18 PM	H2 valve closed
5/27/2010	11:45:18 PM	BCl3 valve closed
5/27/2010	11:45:18 PM	PH3 valve closed
5/27/2010	11:45:18 PM	SiCl4 pre valve closed
5/27/2010	11:45:18 PM	SiCl4 post valve closed
5/27/2010	11:45:18 PM	Main Vac valve closed
5/27/2010	11:45:18 PM	Bypass valve closed
5/27/2010	11:45:18 PM	Bubbler valve closed
5/27/2010	11:45:18 PM	Helium MFC set to  0.000000
5/27/2010	11:45:18 PM	H2 MFC set to  0.000000
5/27/2010	11:45:18 PM	BCl3 MFC set to  0.000000
5/27/2010	11:45:18 PM	PHl3 MFC set to  0.000000
5/27/2010	11:45:18 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:45:18 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	11:45:19 PM	Tube furnace set to 0
5/27/2010	11:45:19 PM	Run finished at 11:45 PM
5/27/2010	11:45:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/27/2010	11:50:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	11:50:31 PM	Recipe started at 11:50 PM
5/27/2010	11:50:31 PM	Helium valve closed
5/27/2010	11:50:31 PM	H2 valve closed
5/27/2010	11:50:31 PM	BCl3 valve closed
5/27/2010	11:50:31 PM	PH3 valve closed
5/27/2010	11:50:31 PM	SiCl4 pre valve closed
5/27/2010	11:50:31 PM	SiCl4 post valve closed
5/27/2010	11:50:31 PM	Main Vac valve closed
5/27/2010	11:50:31 PM	Bubbler valve closed
5/27/2010	11:50:31 PM	Bypass valve opened
5/27/2010	11:50:31 PM	Helium MFC set to  0.000000
5/27/2010	11:50:31 PM	H2 MFC set to  0.000000
5/27/2010	11:50:31 PM	BCl3 MFC set to  0.000000
5/27/2010	11:50:31 PM	PHl3 MFC set to  0.000000
5/27/2010	11:50:31 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:50:31 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	11:50:31 PM	Tube furnace set to 0
5/27/2010	11:51:13 PM	Run aborted at 11:51 PM
5/27/2010	11:51:13 PM	Helium valve closed
5/27/2010	11:51:13 PM	H2 valve closed
5/27/2010	11:51:13 PM	BCl3 valve closed
5/27/2010	11:51:13 PM	PH3 valve closed
5/27/2010	11:51:13 PM	SiCl4 pre valve closed
5/27/2010	11:51:13 PM	SiCl4 post valve closed
5/27/2010	11:51:13 PM	Bypass valve closed
5/27/2010	11:51:13 PM	Main Vac valve closed
5/27/2010	11:51:13 PM	Bubbler valve closed
5/27/2010	11:51:13 PM	Helium MFC set to  0.000000
5/27/2010	11:51:13 PM	H2 MFC set to  0.000000
5/27/2010	11:51:13 PM	BCl3 MFC set to  0.000000
5/27/2010	11:51:13 PM	PHl3 MFC set to  0.000000
5/27/2010	11:51:13 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:51:14 PM	Tube furnace set to 0
5/27/2010	11:51:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	11:52:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	11:52:04 PM	Recipe started at 11:52 PM
5/27/2010	11:52:04 PM	Helium valve closed
5/27/2010	11:52:04 PM	H2 valve closed
5/27/2010	11:52:04 PM	BCl3 valve closed
5/27/2010	11:52:04 PM	PH3 valve closed
5/27/2010	11:52:04 PM	SiCl4 pre valve closed
5/27/2010	11:52:04 PM	SiCl4 post valve closed
5/27/2010	11:52:04 PM	Main Vac valve closed
5/27/2010	11:52:04 PM	Bubbler valve closed
5/27/2010	11:52:04 PM	Bypass valve opened
5/27/2010	11:52:04 PM	Helium MFC set to  0.000000
5/27/2010	11:52:04 PM	H2 MFC set to  0.000000
5/27/2010	11:52:04 PM	BCl3 MFC set to  0.000000
5/27/2010	11:52:04 PM	PHl3 MFC set to  0.000000
5/27/2010	11:52:04 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:52:04 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	11:52:05 PM	Tube furnace set to 0
5/27/2010	11:52:24 PM	Run aborted at 11:52 PM
5/27/2010	11:52:24 PM	Helium valve closed
5/27/2010	11:52:24 PM	H2 valve closed
5/27/2010	11:52:24 PM	BCl3 valve closed
5/27/2010	11:52:24 PM	PH3 valve closed
5/27/2010	11:52:24 PM	SiCl4 pre valve closed
5/27/2010	11:52:24 PM	SiCl4 post valve closed
5/27/2010	11:52:24 PM	Bypass valve closed
5/27/2010	11:52:24 PM	Main Vac valve closed
5/27/2010	11:52:24 PM	Bubbler valve closed
5/27/2010	11:52:24 PM	Helium MFC set to  0.000000
5/27/2010	11:52:24 PM	H2 MFC set to  0.000000
5/27/2010	11:52:24 PM	BCl3 MFC set to  0.000000
5/27/2010	11:52:24 PM	PHl3 MFC set to  0.000000
5/27/2010	11:52:24 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:52:24 PM	Tube furnace set to 0
5/27/2010	11:52:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	11:52:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	11:52:35 PM	Recipe started at 11:52 PM
5/27/2010	11:52:35 PM	Helium valve closed
5/27/2010	11:52:35 PM	H2 valve closed
5/27/2010	11:52:35 PM	BCl3 valve closed
5/27/2010	11:52:35 PM	PH3 valve closed
5/27/2010	11:52:35 PM	SiCl4 pre valve closed
5/27/2010	11:52:35 PM	SiCl4 post valve closed
5/27/2010	11:52:35 PM	Main Vac valve closed
5/27/2010	11:52:35 PM	Bubbler valve closed
5/27/2010	11:52:35 PM	Bypass valve opened
5/27/2010	11:52:35 PM	Helium MFC set to  0.000000
5/27/2010	11:52:35 PM	H2 MFC set to  0.000000
5/27/2010	11:52:35 PM	BCl3 MFC set to  0.000000
5/27/2010	11:52:35 PM	PHl3 MFC set to  0.000000
5/27/2010	11:52:35 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:52:35 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	11:52:36 PM	Tube furnace set to 0
5/27/2010	11:52:47 PM	Run aborted at 11:52 PM
5/27/2010	11:52:47 PM	Helium valve closed
5/27/2010	11:52:47 PM	H2 valve closed
5/27/2010	11:52:47 PM	BCl3 valve closed
5/27/2010	11:52:47 PM	PH3 valve closed
5/27/2010	11:52:47 PM	SiCl4 pre valve closed
5/27/2010	11:52:47 PM	SiCl4 post valve closed
5/27/2010	11:52:47 PM	Bypass valve closed
5/27/2010	11:52:47 PM	Main Vac valve closed
5/27/2010	11:52:47 PM	Bubbler valve closed
5/27/2010	11:52:47 PM	Helium MFC set to  0.000000
5/27/2010	11:52:47 PM	H2 MFC set to  0.000000
5/27/2010	11:52:47 PM	BCl3 MFC set to  0.000000
5/27/2010	11:52:47 PM	PHl3 MFC set to  0.000000
5/27/2010	11:52:47 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:52:47 PM	Tube furnace set to 0
5/27/2010	11:52:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	11:54:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	11:54:53 PM	Recipe started at 11:54 PM
5/27/2010	11:54:53 PM	Helium valve closed
5/27/2010	11:54:53 PM	H2 valve closed
5/27/2010	11:54:53 PM	BCl3 valve closed
5/27/2010	11:54:53 PM	PH3 valve closed
5/27/2010	11:54:53 PM	SiCl4 pre valve closed
5/27/2010	11:54:53 PM	SiCl4 post valve closed
5/27/2010	11:54:53 PM	Main Vac valve closed
5/27/2010	11:54:53 PM	Bubbler valve closed
5/27/2010	11:54:53 PM	Bypass valve opened
5/27/2010	11:54:53 PM	Helium MFC set to  0.000000
5/27/2010	11:54:53 PM	H2 MFC set to  0.000000
5/27/2010	11:54:53 PM	BCl3 MFC set to  0.000000
5/27/2010	11:54:53 PM	PHl3 MFC set to  0.000000
5/27/2010	11:54:53 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:54:53 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	11:54:53 PM	Tube furnace set to 0
5/27/2010	11:55:49 PM	Helium valve closed
5/27/2010	11:55:49 PM	H2 valve closed
5/27/2010	11:55:49 PM	BCl3 valve closed
5/27/2010	11:55:49 PM	PH3 valve closed
5/27/2010	11:55:49 PM	SiCl4 pre valve closed
5/27/2010	11:55:49 PM	SiCl4 post valve closed
5/27/2010	11:55:49 PM	Bubbler valve closed
5/27/2010	11:55:49 PM	Main Vac valve opened
5/27/2010	11:55:49 PM	Bypass valve opened
5/27/2010	11:55:49 PM	Helium MFC set to  0.000000
5/27/2010	11:55:49 PM	H2 MFC set to  0.000000
5/27/2010	11:55:49 PM	BCl3 MFC set to  0.000000
5/27/2010	11:55:49 PM	PHl3 MFC set to  0.000000
5/27/2010	11:55:49 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:55:49 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	11:55:49 PM	Tube furnace set to 0
5/27/2010	11:55:49 PM	Run finished at 11:55 PM
5/27/2010	11:55:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2010	11:57:05 PM	Tube furnace set to 100
5/27/2010	11:59:56 PM	Recipe started at 11:59 PM
5/27/2010	11:59:56 PM	BCl3 valve closed
5/27/2010	11:59:56 PM	PH3 valve closed
5/27/2010	11:59:56 PM	SiCl4 pre valve closed
5/27/2010	11:59:56 PM	SiCl4 post valve closed
5/27/2010	11:59:56 PM	Main Vac valve closed
5/27/2010	11:59:56 PM	Bypass valve closed
5/27/2010	11:59:56 PM	Bubbler valve closed
5/27/2010	11:59:56 PM	Helium valve opened
5/27/2010	11:59:56 PM	H2 valve opened
5/27/2010	11:59:56 PM	Helium MFC set to  475.000000
5/27/2010	11:59:56 PM	H2 MFC set to  25.000000
5/27/2010	11:59:56 PM	BCl3 MFC set to  0.000000
5/27/2010	11:59:56 PM	PHl3 MFC set to  0.000000
5/27/2010	11:59:56 PM	SiCl4 MFC set to  0.000000
5/27/2010	11:59:56 PM	Bypass solenoid MFC set to  0.000000
5/27/2010	11:59:56 PM	Tube furnace set to 200
